Microfluidic Device With Integrated Micropump, In Particular Biochemical Microreactor, And Manufacturing Method Thereof
First Claim
1. A microfluidic device for nucleic acid analysis comprising:
- a) a monolithic semiconductor body;
b) a microfluidic circuit at least partially accommodated in said monolithic semiconductor1 body, wherein said microfluidic circuit includes a sample preparation channel formed on said monolithic semiconductor body and at least one microfluidic channel buried in said monolithic semiconductor body;
c) a micropump, including a plurality of sealed chambers provided with respective openable sealing elements and having a first pressure therein that is different from a second pressure in said microfluidic circuit, wherein said micropump and said microfluidic circuit are configured so that opening said openable sealing elements provides fluidic coupling between the respective chambers and said microfluidic circuit;
characterized in that said openable sealing elements are integrated in said monolithic semiconductor body.
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Accused Products
Abstract
A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body (13), and a micropump (11). The microfluidic circuit (10) includes a sample preparation channel (18) formed on the monolithic semiconductor body (13) and at least one microfluidic channel (20, 22) buried in the monolithic semiconductor body (13). The micropump (11), includes a plurality of sealed chambers (40) provided with respective openable sealing elements (41) and having a first pressure therein that is different from a second pressure in the microfluidic circuit (10). In addition, the micropump (11) and the microfluidic circuit (10) are configured so that opening the openable sealing elements (41) provides fluidic coupling between the respective chambers (40) and the microfluidic circuit (10). The openable sealing elements (41) are integrated in the monolithic semiconductor body (13).
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Citations
26 Claims
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1. A microfluidic device for nucleic acid analysis comprising:
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a) a monolithic semiconductor body; b) a microfluidic circuit at least partially accommodated in said monolithic semiconductor1 body, wherein said microfluidic circuit includes a sample preparation channel formed on said monolithic semiconductor body and at least one microfluidic channel buried in said monolithic semiconductor body; c) a micropump, including a plurality of sealed chambers provided with respective openable sealing elements and having a first pressure therein that is different from a second pressure in said microfluidic circuit, wherein said micropump and said microfluidic circuit are configured so that opening said openable sealing elements provides fluidic coupling between the respective chambers and said microfluidic circuit; characterized in that said openable sealing elements are integrated in said monolithic semiconductor body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A process for manufacturing a microfluidic device for nucleic acid analysis, comprising the steps of:
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a) forming a microfluidic circuit at least partially accommodated in a monolithic semiconductor body, wherein said microfluidic circuit includes a sample preparation channel formed on said monolithic semiconductor body and at least one microfluidic channel buried in said monolithic semiconductor body; and b) forming a micropump, having a plurality of chambers provided with respective openable sealing elements and having a first pressure therein that is different from a second pressure in said microfluidic circuit, wherein said micropump and said microfluidic circuit are configured so that opening said openable sealing elements provides fluidic coupling between the respective chambers and said microfluidic circuit; characterized in that said step of forming a micropump comprises integrating said openable sealing elements. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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Specification