Ceramic coating comprising yttrium which is resistant to a reducing plasma
First Claim
1. An article which is resistant to corrosion or erosion by chemically active reducing plasmas, said article comprising a metal or metal alloy substrate having on its surface a spray coated yttrium-comprising ceramic material, wherein a porosity of said ceramic coating is less than 1.5%.
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Abstract
Particulate generation has been a problem in semiconductor device processing in highly corrosive plasma environments. The problem is exacerbated when the plasma is a reducing plasma. Empirically produced data has shown that the formation of a plasma spray coated yttrium-comprising ceramic such as yttrium oxide, Y2O3—ZrO2 solid solution, YAG, and YF3 provides a low porosity coating with smooth and compacted surfaces when such ceramics are spray coated from a powder feed having an average effective diameter ranging from about 22 μm to about 0.1 μm. These spray-coated materials reduce the generation of particulates in corrosive reducing plasma environments.
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Citations
17 Claims
- 1. An article which is resistant to corrosion or erosion by chemically active reducing plasmas, said article comprising a metal or metal alloy substrate having on its surface a spray coated yttrium-comprising ceramic material, wherein a porosity of said ceramic coating is less than 1.5%.
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13. A method of fabricating an article which is resistant to corrosion or erosion by chemically active reducing plasmas, comprising:
- fabricating said article by plasma spray-coating a metal or metal alloy substrate with a yttrium-comprising ceramic material, wherein said yttrium-comprising ceramic material is in the form of a powder having an average equivalent diameter ranging from about 22 μ
m to about 0.1 μ
m. - View Dependent Claims (14, 15, 16)
- fabricating said article by plasma spray-coating a metal or metal alloy substrate with a yttrium-comprising ceramic material, wherein said yttrium-comprising ceramic material is in the form of a powder having an average equivalent diameter ranging from about 22 μ
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17. A method of fabricating an article which is resistant to corrosion or erosion by chemically active reducing plasmas, comprising:
- fabricating said article by plasma spray-coating a metal or metal alloy substrate with a yttrium-comprising ceramic material, wherein said yttrium-comprising ceramic material is selected from the group consisting of Y2O3—
ZrO2 solid solution, YF3 and combinations thereof.
- fabricating said article by plasma spray-coating a metal or metal alloy substrate with a yttrium-comprising ceramic material, wherein said yttrium-comprising ceramic material is selected from the group consisting of Y2O3—
Specification