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DUAL CONTACT ETCH STOP LAYER PROCESS

  • US 20090215277A1
  • Filed: 02/26/2008
  • Published: 08/27/2009
  • Est. Priority Date: 02/26/2008
  • Status: Abandoned Application
First Claim
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1. A dual contact etch stop layer (dual CESL) process, comprising:

  • providing a substrate having thereon a first device region, a second device region and a shallow trench isolation (STI) region between the first and second device regions;

    forming a first-stress imparting film with a first stress over the substrate, wherein the first-stress imparting film does not cover the second device region; and

    forming a second-stress imparting film with a second stress over the substrate, wherein the second-stress imparting film does not cover the first device region, an overlapped boundary between the first- and second-stress imparting films is created directly above the STI region, and wherein the overlapped boundary is placed in close proximity to the second device region in order to induce the first stress to a channel region thereof in a transversal direction.

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