DRIVING APPARATUS, INDUSTRIAL INSTRUMENT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

• US 20090218964A1
• Filed: 11/10/2008
• Published: 09/03/2009
• Est. Priority Date: 03/03/2008
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Motegi, Yasuhiro
• Granted Patent: US 8,115,425 B2
• Time in Patent Office: Days
• US Class Current: 318/135
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916
• CPC Class Codes: H05K 7/20209 Thermal management, e.g. fan control

Abstract

A driving apparatus which electrically drives a component built in an industrial instrument, comprises a housing including a supply inlet and an exhaust outlet, a fan configured to form an air current so that air is taken into the housing through the supply inlet and exhausted from inside the housing through the exhaust outlet, a driving circuit block which is accommodated in the housing so as to be cooled by the air current, and configured to electrically drive the component, and a cooling unit configured to regulate a temperature of the air exhausted from inside the housing through the exhaust outlet so as to decrease a temperature difference between the air taken into the housing through the supply inlet and the air exhausted from inside the housing through the exhaust outlet.

Claims

1. A driving apparatus which electrically drives a component built in an industrial instrument, comprising:

a housing including a supply inlet and an exhaust outlet;

a fan configured to form an air current so that air is taken into said housing through said supply inlet and exhausted from inside said housing through said exhaust outlet;

a driving circuit block which is accommodated in said housing so as to be cooled by the air current, and configured to electrically drive the component; and

a cooling unit configured to regulate a temperature of the air exhausted from inside said housing through said exhaust outlet so as to decrease a temperature difference between the air taken into said housing through said supply inlet and the air exhausted from inside said housing through said exhaust outlet.

2. The apparatus according to claim 1, further comprising a first controller configured to control a cooling capacity of said cooling unit based on a heating value of said driving circuit block.

3. The apparatus according to claim 2, wherein said first controller controls the cooling capacity of said cooling unit based on an estimate of the heating value of said driving circuit block according to a state of said driving circuit block.

4. The apparatus according to claim 1, further comprising:

a temperature sensor configured to detect the temperature of the air exhausted from inside said housing through said exhaust outlet; and

a second controller configured to control a cooling capacity of said cooling unit based on the output from said temperature sensor.

5. The apparatus according to claim 1, wherein said cooling unit includes a heat exchanger, and a cooling capacity of said cooling unit is controlled by a flow rate of a fluid supplied to said heat exchanger.

6. The apparatus according to claim 1, wherein

the component built in the industrial instrument includes a first component which drives a first element, and a second component which drives a second element at a higher velocity than the first component,

said driving circuit block includes a first driving circuit configured to electrically drive the first component, and a second driving circuit configured to electrically drive the second component, and

said second driving circuit is inserted upstream of said first driving circuit along the air current in said housing.

7. The apparatus according to claim 6, wherein

the industrial instrument includes an exposure unit which projects a pattern of an original held by an original stage onto a substrate held by a substrate stage to expose the substrate to light, and

the first component includes a first driving mechanism which drives the substrate stage, and the second component includes a second driving mechanism which drives the original stage.

8. An industrial instrument including a component and a driving apparatus which electrically drives the component, wherein

the driving apparatus comprises:

a housing including a supply inlet and an exhaust outlet;

a fan configured to form an air current so that air is taken into said housing through said supply inlet and exhausted from inside said housing through said exhaust outlet;

a driving circuit block which is accommodated in said housing so as to be cooled by the air current, and configured to electrically drive the component; and

a cooling unit configured to regulate a temperature of the air exhausted from inside said housing through said exhaust outlet so as to decrease a temperature difference between the air taken into said housing through said supply inlet and the air exhausted from inside said housing through said exhaust outlet.

9. An exposure apparatus including an exposure unit which projects a pattern of an original held by an original stage onto a substrate held by a substrate stage to expose the substrate to light, and a driving apparatus which drives a component built in the exposure unit, wherein

the driving apparatus comprises:

a housing including a supply inlet and an exhaust outlet;

a fan configured to form an air current so that air is taken into said housing through said supply inlet and exhausted from inside said housing through said exhaust outlet;

a driving circuit block which is accommodated in said housing so as to be cooled by the air current, and configured to electrically drive the component; and

a cooling unit configured to regulate a temperature of the air exhausted from inside said housing through said exhaust outlet so as to decrease a temperature difference between the air taken into said housing through said supply inlet and the air exhausted from inside said housing through said exhaust outlet.

10. A device manufacturing method comprising the steps of:

exposing a substrate to light by an exposure apparatus; and

developing the substrate exposed in the step of exposing,

wherein the exposure apparatus including an exposure unit which projects a pattern of an original held by an original stage onto a substrate held by a substrate stage to expose the substrate to light, and a driving apparatus which drives a component built in the exposure unit, and

the driving apparatus comprises;

a housing including a supply inlet and an exhaust outlet;

a fan configured to form an air current so that air is taken into said housing through said supply inlet and exhausted from inside said housing through said exhaust outlet;

a driving circuit block which is accommodated in said housing so as to be cooled by the air current, and configured to electrically drive the component; and

a cooling unit configured to regulate a temperature of the air exhausted from inside said housing through said exhaust outlet so as to decrease a temperature difference between the air taken into said housing through said supply inlet and the air exhausted from inside said housing through said exhaust outlet.