PROBE FOR TESTING ELECTRICAL PROPERTIES OF A TEST SAMPLE

• US 20090219047A1
• Filed: 10/31/2006
• Published: 09/03/2009
• Est. Priority Date: 10/31/2005
• Status: Active Grant

• Current Assignee: CAPRES A/S (KLA Corporation)
• Original Assignee: CAPRES A/S (KLA Corporation)
• Inventors: Petersen, Peter R.E., Hansen, Torben Mikael, Petersen, Dirch
• Granted Patent: US 8,310,258 B2
• Time in Patent Office: Days
• US Class Current: 324/755.50
• CPC Class Codes: G01R 1/06716 Elastic

Abstract

A probe for testing electrical properties of test samples includes a body having a probe arm defining proximal and distal ends, the probe arm extending from the body at the proximal end of the probe arm, whereby a first axis is defined by the proximal and the distal ends. The probe arm defines a geometry allowing flexible movement of the probe arm along the first axis and along a second axis perpendicular to the first axis, and along a third axis orthogonal to a plane defined by the first axis and the second axis.

Claims

1. A probe for testing electrical properties of a test sample, said probe comprising:

a body having a probe arm defining a proximal and an opposite distal end, said probe arm extending from said body at said proximal end of said probe arm, a first axis being defined by said proximal and said distal end;

said probe arm defining a geometry allowing flexible movement of said probe arm along said first axis and along a second axis perpendicular to said first axis and along a third axis orthogonal to a plane defined by said first axis and said second axis.

2. The probe according to claim 1. wherein said probe arm comprises:

a supporting structure supporting a contact probe for establishing electrical contact to said test sample, a pad for establishing electrical contact to a test apparatus, and an electrical conductive strip positioned on or in said body for establishing electrical contact between said contact probe and said pad.

3. The probe according to claim 1, wherein said geometry is selected from a group consisting of semi-circular, square, rectangular, triangular, and any combinations thereof.

4. The probe according to claim 1, wherein said geometry includes two substantially linear parts connected so as to define an angle.

5. The probe according to claim 4, wherein said angle is 90 degrees.

6. The probe according to claim 1, wherein said probe arm defines substantially equal spring constants in the direction of said first, second and third axes.

7. The probe according to claim 1, wherein said body includes a plurality of probe arms.

8. The probe according to claim 7, wherein said plurality of probe arms define similar geometries.

9. The probe according to claim 7, wherein said plurality of probe arms define at least two different geometries.

10. The probe according to claim 1, wherein said probe, when in its intended position, defines spring constants that, when projected onto a plane of a surface of said test sample are substantially equal, or define a ratio between 1:

1 to 1;

20.

11. The probe according to claim 7, wherein said plurality of probe arms each defines an L-shaped geometry.

12. A probe for testing electrical properties of a test sample, said probe comprising:

a body defining a first planar surface;

a probe arm defining a first part having a proximal end and an opposite distal end, said probe arm extending from said body at said proximal end of said first part, a first axis being defined by said proximal and said distal end of said first part, said probe arm extending parallel with said first planar surface;

said probe aim defining a geometry allowing flexible movement of said probe arm along said first axis and along a second axis perpendicular to said first axis and along a third axis orthogonal to a plane defined by said first axis and said second axis.

13. The probe according to claim 12, wherein said arm is positioned in co-planar relationship with said first planar surface.

14. The probe according to claim 12, wherein said body defines a second planar surface being substantially orthogonal to said first planar surface, said probe arm extending from said second planar surface.

15. The probe according to claim 12, wherein said probe arm defines an L-shaped geometry.

16. A test probe for testing electrical properties of test samples. said test probe comprising:

a body comprising an electrical conductive contact for establishing electrical contact with a surface of said test sample, said body being flexibly suspended by spring means so as to allow said test probe to establish static contact with said surface of said test sample.

17. (canceled)