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SYSTEM AND METHOD FOR DETECTING LOCAL MECHANICAL STRESS IN INTEGREATED DEVICES

  • US 20090219508A1
  • Filed: 02/29/2008
  • Published: 09/03/2009
  • Est. Priority Date: 02/29/2008
  • Status: Active Grant
First Claim
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1. A method of detecting mechanical stress in integrated devices, the method comprising:

  • enabling the detection of a photovoltage difference between a scan probe device and a surface portion of an integrated device, the scan probe device being configured to deflect in response to the photovoltage difference;

    measuring the deflection of the scan probe device in response to the photovoltage difference between the scan probe device and the surface portion of the integrated device; and

    calculating a local stress level within the integrated device by determining a local work function of the surface portion of the integrated device based upon the deflection of the scan probe device.

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