SYSTEM AND METHOD FOR DETECTING LOCAL MECHANICAL STRESS IN INTEGREATED DEVICES
First Claim
1. A method of detecting mechanical stress in integrated devices, the method comprising:
- enabling the detection of a photovoltage difference between a scan probe device and a surface portion of an integrated device, the scan probe device being configured to deflect in response to the photovoltage difference;
measuring the deflection of the scan probe device in response to the photovoltage difference between the scan probe device and the surface portion of the integrated device; and
calculating a local stress level within the integrated device by determining a local work function of the surface portion of the integrated device based upon the deflection of the scan probe device.
3 Assignments
0 Petitions
Accused Products
Abstract
A method of detecting local mechanical stress in integrated devices is provided, the method comprising: enabling the detection of a photovoltage difference between a scan probe device and a surface portion of an integrated device, the scan probe device being configured to deflect in response to the photovoltage difference; measuring the deflection of the scan probe device in response to the photovoltage difference between the scan probe device and the surface portion of the integrated device; and calculating a local stress level within the integrated device by determining a local work function of the surface portion of the integrated device based upon the deflection of the scan probe device.
-
Citations
25 Claims
-
1. A method of detecting mechanical stress in integrated devices, the method comprising:
-
enabling the detection of a photovoltage difference between a scan probe device and a surface portion of an integrated device, the scan probe device being configured to deflect in response to the photovoltage difference; measuring the deflection of the scan probe device in response to the photovoltage difference between the scan probe device and the surface portion of the integrated device; and calculating a local stress level within the integrated device by determining a local work function of the surface portion of the integrated device based upon the deflection of the scan probe device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method of detecting mechanical stress in integrated devices, the method comprising:
-
irradiating with a first laser signal and a second laser signal at a surface portion of an integrated device enabling the detection of a photovoltage difference between a scan probe device and the surface portion of the integrated device, the scan probe device being suspended over the integrated device; measuring the deflection of the scan probe device in response to the photovoltage difference; and calculating a local stress level within the integrated device at the surface portion by determining a local work function of the surface portion of the integrated device based on the deflection of the scan probe device. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. An apparatus for detecting mechanical stress in integrated devices, the apparatus comprising:
-
an integrated device having a surface portion with a local work function; a scan probe device suspended over the integrated device; an optical controller configured for enabling the detection of a photovoltage difference between the integrated device and the scan probe device, the scan probe device being configured to move in response to the photovoltage difference; a scan probe detector configured for measuring the movements of the scan probe device in response to the photovoltage difference; and a processing unit in signal communication with the scan probe detector, the processing unit being configured for calculating a local stress level within the integrated device by determining the local work function of the surface portion of the integrated device based upon the deflection of the scan probe device. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
-
Specification