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Method and System for Measuring Sub-Surface Composition of a Sample

  • US 20090219523A1
  • Filed: 02/23/2006
  • Published: 09/03/2009
  • Est. Priority Date: 09/16/2005
  • Status: Active Grant
First Claim
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1. A method for measuring a composition of a sample, the method comprising:

  • irradiating an illumination surface area of the sample using a light source;

    receiving light from a plurality of emitting surface areas of the sample, each emitting surface area at a different location, the received light scattered by the sample;

    wherein a cumulative area of the illumination surface area is greater than a cumulative area of two emitting surface areas of the plurality of emitting surface areas;

    for each emitting surface area, determining spectral content information associated with received light corresponding to that emitting surface area; and

    determining composition information corresponding to a sub-surface region of the sample based on the determined spectral content information.

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