Method and System for Measuring Sub-Surface Composition of a Sample
First Claim
1. A method for measuring a composition of a sample, the method comprising:
- irradiating an illumination surface area of the sample using a light source;
receiving light from a plurality of emitting surface areas of the sample, each emitting surface area at a different location, the received light scattered by the sample;
wherein a cumulative area of the illumination surface area is greater than a cumulative area of two emitting surface areas of the plurality of emitting surface areas;
for each emitting surface area, determining spectral content information associated with received light corresponding to that emitting surface area; and
determining composition information corresponding to a sub-surface region of the sample based on the determined spectral content information.
2 Assignments
0 Petitions
Accused Products
Abstract
In a method for measuring a composition of a sample, an illumination surface area of the sample is illuminated using a light source, and light from a plurality of emitting surface areas of the sample is received, each emitting surface area at a different location, the received light scattered by the sample. A cumulative area of the illumination surface area is greater than a cumulative area of two emitting surface areas of the plurality of emitting surface areas. For each emitting surface area, spectral content information associated with received light corresponding to that emitting surface area is determined, and composition information corresponding to a sub-surface region of the sample is determined based on the determined spectral content information. Different shapes of illumination surface areas as well as the plurality of emitting surface areas may advantageously be utilized for various specimen or sample geometries or illumination sources.
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Citations
75 Claims
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1. A method for measuring a composition of a sample, the method comprising:
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irradiating an illumination surface area of the sample using a light source; receiving light from a plurality of emitting surface areas of the sample, each emitting surface area at a different location, the received light scattered by the sample; wherein a cumulative area of the illumination surface area is greater than a cumulative area of two emitting surface areas of the plurality of emitting surface areas; for each emitting surface area, determining spectral content information associated with received light corresponding to that emitting surface area; and determining composition information corresponding to a sub-surface region of the sample based on the determined spectral content information. - View Dependent Claims (2, 3, 4, 7, 12, 13, 14, 15, 16, 17, 19, 23, 24, 25, 26, 31, 35, 36, 37)
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5-6. -6. (canceled)
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8-11. -11. (canceled)
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18. (canceled)
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20-22. -22. (canceled)
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27-30. -30. (canceled)
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32-34. -34. (canceled)
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38. An apparatus for measuring a composition of a sample, comprising:
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an illumination system to illuminate an illumination surface area of the sample; a plurality of light receivers to receive light from a plurality of emitting surface areas of the sample, each emitting surface area at a different location, the received light scattered by the sample; wherein a cumulative area of the illumination surface area is greater than a cumulative area of two emitting surface areas of the plurality of emitting surface areas; a spectrum analyzer optically coupled to receive light received by the plurality of light receivers, the spectrum analyzer configured to generate corresponding spectral content information associated with each emitting surface area of the sample; and a computing device communicatively coupled to the spectrum analyzer, the computing device configured to determine composition information corresponding to a sub-surface region of the sample based on the generated spectral content information. - View Dependent Claims (39, 40, 41, 43, 47, 50, 51, 52, 53, 54, 56, 61, 62, 63, 64, 69, 73, 74, 75)
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42. (canceled)
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44-46. -46. (canceled)
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48-49. -49. (canceled)
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55. (canceled)
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57-60. -60. (canceled)
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65-68. -68. (canceled)
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70-72. -72. (canceled)
Specification