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Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths

  • US 20090219537A1
  • Filed: 02/28/2008
  • Published: 09/03/2009
  • Est. Priority Date: 02/28/2008
  • Status: Abandoned Application
First Claim
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1. A method of measuring properties of an unknown sample, comprising:

  • providing a reflectometer and at least one reference sample, wherein the at least one reference sample is unstable under conditions in which the reflectometer is operated;

    collecting a set of data from the unknown sample and at least one reference sample; and

    utilizing a combination of the unknown sample and reference sample data that is independent of incident intensity to determine a property of the unknown sample, without calibrating incident reflectometer intensity.

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