Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths
First Claim
1. A method of measuring properties of an unknown sample, comprising:
- providing a reflectometer and at least one reference sample, wherein the at least one reference sample is unstable under conditions in which the reflectometer is operated;
collecting a set of data from the unknown sample and at least one reference sample; and
utilizing a combination of the unknown sample and reference sample data that is independent of incident intensity to determine a property of the unknown sample, without calibrating incident reflectometer intensity.
4 Assignments
0 Petitions
Accused Products
Abstract
A method and apparatus is disclosed for measuring properties of an unknown sample. A reflectometer and one or more reference pieces is provided. A set of data is collected from the unknown sample and a combination of the reference pieces. A combination of the sample and reference piece data independent of incident intensity is used to determine a property of the unknown sample without calibrating incident reflectometer intensity. The method and apparatus disclosed can measure properties of thin films or scattering structures on semiconductor work pieces. In one embodiment the reflectometer utilizes vacuum ultraviolet (VUV) wavelength reflectometry. Multiple relative reflectance measurements are used to overcome effects of the inevitable contamination buildup that occurs when using optical systems in the VUV region. While advantageous for VUV wavelengths, the method described herein is generally applicable to any wavelength range, and is advantageous in situations where stable reference samples are not available.
-
Citations
39 Claims
-
1. A method of measuring properties of an unknown sample, comprising:
-
providing a reflectometer and at least one reference sample, wherein the at least one reference sample is unstable under conditions in which the reflectometer is operated; collecting a set of data from the unknown sample and at least one reference sample; and utilizing a combination of the unknown sample and reference sample data that is independent of incident intensity to determine a property of the unknown sample, without calibrating incident reflectometer intensity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A system for measuring properties of an unknown sample, comprising:
-
at least one reference sample; a reflectometer configured for collecting a set of data from the unknown sample and the at least one reference sample wherein the at least one reference sample is unstable under conditions in which the reflectometer is operated; and a computer operating a software routine configured to utilize a combination of the unknown sample and reference sample data that is independent of incident intensity to determine a property of the unknown sample, without calibrating incident reflectometer intensity. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
-
-
26. A system for measuring properties of an unknown sample, comprising:
-
at least one reference sample; a reflectometer, configured for collecting a set of data from the unknown sample and the at least one reference sample wherein the at least one reference sample is unstable under conditions in which the reflectometer is operated; and a computer operating a software routine that selectably operates in at least one of a plurality of measurement modes, the plurality of measurement modes including at least a first measurement mode and a second measurement mode, wherein, the first measurement mode is configured to utilize a combination of the unknown sample and reference sample data that is independent of incident intensity to determine a property of the unknown sample, without calibrating incident reflectometer intensity, and the second measurement mode is configured to utilize the reference sample data in a manner that is independent of incident intensity to determine one or more properties of one or more reference pieces, thereby determining the incident intensity of the reflectometer, after which reflectance of unknown samples may be determined. - View Dependent Claims (27, 28, 29, 30, 31)
-
-
32. A method of measuring properties of an unknown sample, comprising:
-
providing a reflectometer and at least one reference sample, wherein the at least one reference sample is unstable under conditions in which the reflectometer is operated; collecting a set of data from the unknown sample and at least one reference sample; and selectably operating the system in at least one of a plurality of measurement modes, the plurality of measurement modes including at least a first measurement mode and a second measurement mode, wherein, the first measurement mode is configured to utilize a combination of the unknown sample and reference sample data that is independent of incident intensity to determine a property of the unknown sample, without calibrating incident reflectometer intensity, and the second measurement mode is configured to utilize the reference sample data in a manner that is independent of incident intensity to determine one or more properties of one or more reference pieces, thereby determining the incident intensity of the reflectometer, after which reflectance of unknown samples may be determined. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39)
-
Specification