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Method and apparatus for layer thickness measurement

  • US 20090222238A1
  • Filed: 02/25/2009
  • Published: 09/03/2009
  • Est. Priority Date: 09/30/2005
  • Status: Active Grant
First Claim
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1. A method for optical measurement of a thickness of a layer on a surface, the method comprising:

  • a. sending a focused beam of light onto a spot on the layer whereby a substantial part of the beam is refracted for transmission through the layer to illuminate a region on the surface;

    b. detecting diffuse reflections from the spot and the region on the surface using detecting equipment;

    c. determine a separation between centers of the detected spot and the region; and

    d. using the separation between the centers, and geometric properties of the beam, the surface, and the detecting equipment, and an index of refraction of the layer to compute a thickness of the layer.

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