TWO-AXIS DIRECT FLUID SHEAR STRESS SENSOR
First Claim
1. A multi-axis direct shear stress sensor comprising:
- a shear force collecting plate mounted substantially flush and coplanar with an adjacent associated wall exposed to fluid flow;
a multi-axis torsional sensor to measure torsional strain about at least two axis;
a gimbal structure including an arm interconnecting said shear force collecting plate and said multi-axis torsional sensor to thereby facilitate pivotal movement of said shear force collecting plate in response to fluid flow across a surface thereof;
wherein said pivotal movement of said shear force collecting plate causes deformation of said torsional sensor thereby inducing said torsional strain therein.
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Abstract
A micro sized multi-axis semiconductor skin friction/wall shear stress induced by fluid flow. The sensor design includes a shear/strain transduction gimble connected to a force collecting plate located at the flow boundary surface. The shear force collecting plate is interconnected by an arm to offset the tortional hinges from the fluid flow. The arm is connected to the shear force collecting plate through dual axis torsional hinges with piezoresistive torsional strain gauges. These gauges are disposed on the tortional hinges and provide a voltage output indicative of applied shear stress acting on the force collection plate proximate the flow boundary surface. Offsetting the torsional hinges creates a force concentration and resolution structure that enables the generation of a large stress on the strain gauge from small shear stress, or small displacement of the collecting plate. The design also isolates the torsional sensors from exposure to the fluid flow.
16 Citations
8 Claims
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1. A multi-axis direct shear stress sensor comprising:
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a shear force collecting plate mounted substantially flush and coplanar with an adjacent associated wall exposed to fluid flow; a multi-axis torsional sensor to measure torsional strain about at least two axis; a gimbal structure including an arm interconnecting said shear force collecting plate and said multi-axis torsional sensor to thereby facilitate pivotal movement of said shear force collecting plate in response to fluid flow across a surface thereof;
wherein said pivotal movement of said shear force collecting plate causes deformation of said torsional sensor thereby inducing said torsional strain therein. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification