CHEMICAL MICROREACTOR AND METHOD THEREOF
First Claim
1. A method for forming a chemical microreactor comprising:
- forming at least one capillary microchannel in a silicon substrate having at least one inlet and at least one outlet,integrating at least one heater into the chemical microreactor,interfacing the capillary microchannel with a liquid chemical reservoir at the inlet of the capillary microchannel,interfacing the capillary microchannel with a porous membrane at the outlet of the capillary microchannel, such that gas flow moves in a horizontal direction from the inlet through the microchannel and moves in a vertical direction from the microchannel through the outlet, wherein the porous membrane has at least one catalyst material imbedded therein.
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Abstract
A method for forming a chemical microreactor includes forming at least one capillary microchannel in a substrate having at least one inlet and at least one outlet, integrating at least one heater into the chemical microreactor, interfacing the capillary microchannel with a liquid chemical reservoir at the inlet of the capillary microchannel, and interfacing the capillary microchannel with a porous membrane near the outlet of the capillary microchannel, the porous membrane being positioned beyond the outlet of the capillary microchannel, wherein the porous membrane has at least one catalyst material imbedded therein.
85 Citations
11 Claims
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1. A method for forming a chemical microreactor comprising:
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forming at least one capillary microchannel in a silicon substrate having at least one inlet and at least one outlet, integrating at least one heater into the chemical microreactor, interfacing the capillary microchannel with a liquid chemical reservoir at the inlet of the capillary microchannel, interfacing the capillary microchannel with a porous membrane at the outlet of the capillary microchannel, such that gas flow moves in a horizontal direction from the inlet through the microchannel and moves in a vertical direction from the microchannel through the outlet, wherein the porous membrane has at least one catalyst material imbedded therein. - View Dependent Claims (2, 3, 4, 5)
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6. A method for forming a chemical microreactor comprising:
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forming at least one capillary microchannel in a substrate having at least, one inlet and at least one outlet, integrating at least one heater into the chemical microreactor, interfacing the capillary microchannel with a liquid chemical reservoir at the inlet of the capillary microchannel, interfacing the capillary microchannel with a porous membrane near the outlet of the capillary microchannel, the porous membrane being positioned beyond the outlet of the capillary microchannel, wherein the porous membrane has at least one catalyst material imbedded therein. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification