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CHEMICAL MICROREACTOR AND METHOD THEREOF

  • US 20090223925A1
  • Filed: 03/27/2009
  • Published: 09/10/2009
  • Est. Priority Date: 12/05/2001
  • Status: Active Grant
First Claim
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1. A method for forming a chemical microreactor comprising:

  • forming at least one capillary microchannel in a silicon substrate having at least one inlet and at least one outlet,integrating at least one heater into the chemical microreactor,interfacing the capillary microchannel with a liquid chemical reservoir at the inlet of the capillary microchannel,interfacing the capillary microchannel with a porous membrane at the outlet of the capillary microchannel, such that gas flow moves in a horizontal direction from the inlet through the microchannel and moves in a vertical direction from the microchannel through the outlet, wherein the porous membrane has at least one catalyst material imbedded therein.

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