Transistor and method of manufacturing the same
First Claim
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1. A transistor comprising:
- a channel layer;
a source and a drain respectively contacting opposing ends of the channel layer;
a gate electrode isolated from the channel layer;
a gate insulating layer between the channel layer and the gate electrode; and
an insertion layer between the channel layer and the gate insulating layer, the insertion layer having a work function different from that of the channel layer.
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Abstract
A transistor according to example embodiments may include a channel layer, a source and a drain respectively contacting ends of the channel layer, a gate electrode separated from the channel layer, a gate insulating layer interposed between the channel layer and the gate electrode, and/or an insertion layer that is formed between the channel layer and the gate insulating layer. The insertion layer may have a work function different from that of the channel layer.
54 Citations
20 Claims
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1. A transistor comprising:
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a channel layer; a source and a drain respectively contacting opposing ends of the channel layer; a gate electrode isolated from the channel layer; a gate insulating layer between the channel layer and the gate electrode; and an insertion layer between the channel layer and the gate insulating layer, the insertion layer having a work function different from that of the channel layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of manufacturing a transistor, comprising:
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forming a channel layer and a gate electrode on a substrate, the channel layer isolated from the gate electrode; forming a source and a drain on the substrate, the source and the drain respectively contacting opposing ends of the channel layer; forming a gate insulating layer between the channel layer and the gate electrode; and forming an insertion layer between the channel layer and the gate insulating layer, the insertion layer having a work function different from that of the channel layer. - View Dependent Claims (17, 18, 19, 20)
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Specification