Semiconductor device

• US 20090224241A1
• Filed: 07/26/2005
• Published: 09/10/2009
• Est. Priority Date: 07/26/2004
• Status: Active Grant

• Current Assignee: Rambus Inc.
• Original Assignee: System Fabrication Technologies, Inc.
• Inventors: Yoshida, Kenji
• Granted Patent: US 7,683,492 B2
• Time in Patent Office: Days
• US Class Current: 257/48
• CPC Class Codes: H01L 2224/45124 Aluminium (Al) as principal constituent
• CPC Class Codes: H01L 2224/48 of an individual wire connector
• CPC Class Codes: H01L 23/5386 Geometry or layout of the interconnection structure
• CPC Class Codes: H01L 25/18 the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/30107 Inductance

Abstract

The present invention provides a semiconductor device which can realize the mounting of a plurality of chips at a high-speed, with high packaging density and at a low cost. In mounting a memory device chip 103 and an ASIC 104 on a wiring chip 102, connection pads 110, 116 are respectively formed along one opposing sides of the memory device chip 103 and the ASIC 104 on the wiring chip 102, the arrangement positions of the respective connection pads 110, 116 define the shortest distance assumes the shortest distance therebetween and, at the same time wiring lines which are formed on the wiring chip 102 are also shortened. Accordingly, it is possible to mount the memory device chip 103 and the ASIC 104 on the wiring chip 102 with high packaging density and, at the same time, since the wiring distance can be shortened, the high speed operation can be realized.

Claims

1. A semiconductor device comprising:

a wiring chip having a pair of first connection pad groups constituted by a plurality of wiring lines arranged in parallel and a plurality of pads connected to respective one end side and other end side of the wiring lines;

a first semiconductor chip, having a group of second connection pads formed of a plurality of pads arranged along one side thereof; and

a second semiconductor chip, having a group of third connection pads formed of a plurality of pads arranged along one side thereof, wherein

the first semiconductor chip and the second semiconductor chip are mounted on the wiring chip such that

the one side along which the group of second connection pads of the first semiconductor chip are formed and the one side along which the group of third connection pads of the second semiconductor chip are formed to face each other,

the group of first connection pads on one side and the group of second connection pads are connected with each other, and

the group of first connection pads on another side and the group of third connection pads are connected with each other.

2. A semiconductor device according to claim 1, wherein at least one of the first semiconductor chip or the second semiconductor chip is mounted on the wiring chip via bumps by flip-chip mounting.

3. A semiconductor device according to claim 2, wherein the bumps are formed on the respective pads which constitute the first group of connection pads in advance.

4. A semiconductor device according to claim 2, wherein the bumps are made of metal which contains Au.

5. A semiconductor device according to claim 1, wherein the first group of connection pads are comprises 2000 to 5000 pieces of connection pads.

6. A semiconductor device according to claim 1, wherein an arrangement pitch of the pads which constitute the first groups of connection pads, the second groups of connection pads and the third groups of connection pads is set to 20 μ

m to 60 μ

m.

7. A semiconductor device according to claim 1, wherein a semiconductor substrate which constitutes the wiring chip, a semiconductor substrate which constitutes the first semiconductor chip and a semiconductor substrate which constitutes the second semiconductor chip are made of the same material.

8. A semiconductor device according to claim 1, wherein a semiconductor substrate which constitutes the wiring chip, a semiconductor substrate which constitutes the first semiconductor chip and a semiconductor substrate which constitutes the second semiconductor chip are formed of a silicon substrate.

9. A semiconductor device according to claim 1, wherein the first semiconductor chip is a memory device chip having a memory means for inputting and outputting signals in parallel for each predetermined number of bits, and the second semiconductor chip is a specific-use logic circuit chip for inputting and outputting signals with the memory device chip in parallel for each predetermined number of bits.

10. A semiconductor device according to claim 1, wherein the wiring chip includes a plurality of power source lines which supplies predetermined power source voltages to the first semiconductor chip and the second semiconductor chip.

11. A semiconductor device according to claim 1, wherein a conductive wiring line which prevents crosstalk is provided between wiring lines of the wiring chip.

12. A semiconductor device according to claim 1, wherein test pads are further provided.

13. A semiconductor device according to claim 12, wherein

the semiconductor device has the test pads provided on the memory device chip, and uses the test pads when performing a wafer test of the memory device chip, and the memory device chip is measured by inputting and/or outputting test signals to the test pads at the time of performing the wafer test.

14. A semiconductor device according to claim 1, wherein a first group of power source pads formed of a plurality of pads is formed in a region where the second group of connection pads of the first semiconductor chip is not formed, and all pads which are positioned closest to an outermost periphery of the first semiconductor chip out of the second group of connection pads and the first group of power source pads are set as dummy pads which are not electrically connected with the first group of connection pads, a second group of power source pads formed of a plurality of pads is formed in a region where the third group of connection pads of the second semiconductor chip is not formed, and all pads which are positioned closest to an outermost periphery of the second semiconductor chip out of the third group of connection pads and the second group of power source pads are set as dummy pads which are not electrically connected with the first group of connection pads.

15. A semiconductor device according to claim 1, wherein the respective pads of the second group of connection pads of the first semiconductor chip and the respective pads of the third group of connection pads of the second semiconductor chip are connected with each other via the wiring lines so as to make wiring lengths of all of the plurality of wiring lines arranged on the wiring chip equal to each other.

16. A semiconductor device comprising:

a wiring chip having a pair of first connection pad groups which are constituted of a plurality of wiring lines arranged in parallel and a plurality of pads connected to respective one end side and other end side of the wiring lines and are arranged in a staggered pattern;

a first semiconductor chip, having a group of second connection pads which is formed of a plurality of pads arranged along one side thereof in a staggered pattern; and

a second semiconductor chip, having a group of third connection pads which is formed of a plurality of pads arranged along one side thereof in a staggered pattern, wherein

the first semiconductor chip and the second semiconductor chip are mounted on the wiring chip via bumps by flip chip mounting such that

the one side along which the second connection pads of the first semiconductor chip are formed and the one side along which the third connection pads of the second semiconductor chip are formed so as to face each other,

the group of first connection pads on one side and the group of second connection pads are connected with each other,

the group of first connection pads on another side and the group of third connection pads are connected with each other, and the first semiconductor chip and the second conductor chip are connected with each other by a bus line connection via bus drivers and bus detectors which are provided to the respective chips,

a semiconductor substrate which constitutes the wiring chip, a semiconductor substrate which constitutes the first semiconductor chip and a semiconductor substrate which constitutes second semiconductor chip are formed of a silicon substrate,

the first semiconductor chip is a memory device chip having a memory means which inputs and outputs signals in parallel for each predetermined number of bits, and the second semiconductor chip is a logic circuit chip which inputs and outputs signals in parallel for each predetermined number of bits with the memory device chip, and

the respective pads of the second group of connection pads of the first semiconductor chip and the respective pads of the third group of connection pads of the second semiconductor chip are connected with each other via the wiring lines such that all of the plurality of wiring lines arranged on the wiring chip have the same wiring length, wherein the pads of the second group of connection pads of the first semiconductor chip positioned closest to opposing sides of the first semiconductor chip and the second semiconductor chip and the pads of the third group of connection pads of the second semiconductor chip positioned remotest from the opposing sides are connected and, at the same time, the pads of the second group of the connection pads of the first semiconductor chip positioned remotest from the opposing sides and the pads of the third group of the connection pads of the second semiconductor chip positioned closest to the opposing sides are connected.