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METHOD OF PRODUCING A DIFFRACTION GRATING ELEMENT

  • US 20090224416A1
  • Filed: 11/18/2005
  • Published: 09/10/2009
  • Est. Priority Date: 11/18/2005
  • Status: Active Grant
First Claim
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1. A method of producing a diffraction grating (10) by using a mold (50), which mold (50) has a plurality of adjacent microscopic grooves (58), the inclination (φ

  • ) of said grooves (58) being greater than or equal to 20 degrees and smaller than or equal to 70 degrees with respect to the normal (N) of the plane of the mold (50), the depth (h) of the grooves (58) being greater than or equal to 0.4 times the grating period (d) of the mold (50), the grating period (d) of said mold (50) being greater than or equal to 0.2 μ

    m and smaller than or equal to 10 μ

    m, and the clearance angle (y) of said grooves (58) being greater than 0 degrees and smaller than or equal to 20 degrees,said method comprising at least;

    applying an anti-adhesion layer (30) to said mold (50) to facilitate separation of the diffraction grating (10) from said mold (50),applying curable substance (M1) to said mold (50),curing said substance (M1) at least partially to produce the diffraction grating (10), andseparating said diffraction grating (10) from said mold (50).

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