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VIBRATION ELEMENTS

  • US 20090225384A1
  • Filed: 03/10/2009
  • Published: 09/10/2009
  • Est. Priority Date: 03/10/2008
  • Status: Active Grant
First Claim
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1. A vibration unit, comprising:

  • a frame;

    a vibration element, including a substrate, configured to vibrate and having at least two etched surfaces;

    a beam configured to connect the vibration element to the frame; and

    a meeting position of the at least two etched surfaces is located where a first etching process, which takes place on a first surface of the substrate and a second etching process, which takes place on a second surface of the substrate meet, and the meeting position is located at a position other than a center position in a width direction of the beam.

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