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Accelerometer with Enhanced DC Stability

  • US 20090228235A1
  • Filed: 03/04/2009
  • Published: 09/10/2009
  • Est. Priority Date: 03/06/2008
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a substrate;

    a first element;

    an actuator, wherein the actuator induces a first motion of the first element with respect to the substrate;

    a second element, wherein the second element comprises a first physical adaption for moving with a second motion in response to an acceleration;

    a first sensor, wherein the first sensor provides a first signal that is based on the first motion; and

    a second sensor, wherein the second sensor provides a second signal that is based on the second motion.

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