Physical quantity sensor
First Claim
1. A physical quantity sensor for detecting a physical quantity comprising:
- a first substrate having a first principal surface and a first backside surface;
a first element arranged on the first principal surface of the first substrate;
a second substrate having a second principal surface and a second backside surface; and
a second element arranged on the second principal surface of the second substrate;
a first wiring layer and a second wiring layer,wherein the first principal surface of the first substrate faces and contacts the second principal surface of the second substrate so that an accommodation space is provided between the first substrate and the second substrate,wherein the second substrate includes a first through hole, which penetrates the second substrate from the second backside surface and reaches the first element on the first principal surface,wherein the second substrate further includes a second through hole, which penetrates the second substrate from the second backside surface and reaches the second element on the second principal surface,wherein the second substrate further includes a first through hole electrode and a second through hole electrode,wherein the first through hole electrode is arranged in the first through hole via an insulation film, and the second through hole electrode is arranged in the second through hole via the insulation film, andwherein the first wiring layer is electrically coupled with the first though hole electrode, and the second wiring layer is electrically coupled with the second through hole electrode.
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Accused Products
Abstract
A physical quantity sensor for detecting a physical quantity includes: a first substrate having a first physical quantity detection element; a second substrate having a second physical quantity detection element, wherein the second substrate contacts the first substrate; and an accommodation space disposed between the first substrate and the second substrate. The first physical quantity detection element is disposed in the accommodation space. The first physical quantity detection element is protected with the first substrate and the second substrate since the first physical quantity detection element is sealed in the accommodation space.
69 Citations
12 Claims
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1. A physical quantity sensor for detecting a physical quantity comprising:
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a first substrate having a first principal surface and a first backside surface; a first element arranged on the first principal surface of the first substrate; a second substrate having a second principal surface and a second backside surface; and a second element arranged on the second principal surface of the second substrate; a first wiring layer and a second wiring layer, wherein the first principal surface of the first substrate faces and contacts the second principal surface of the second substrate so that an accommodation space is provided between the first substrate and the second substrate, wherein the second substrate includes a first through hole, which penetrates the second substrate from the second backside surface and reaches the first element on the first principal surface, wherein the second substrate further includes a second through hole, which penetrates the second substrate from the second backside surface and reaches the second element on the second principal surface, wherein the second substrate further includes a first through hole electrode and a second through hole electrode, wherein the first through hole electrode is arranged in the first through hole via an insulation film, and the second through hole electrode is arranged in the second through hole via the insulation film, and wherein the first wiring layer is electrically coupled with the first though hole electrode, and the second wiring layer is electrically coupled with the second through hole electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A physical quantity sensor for detecting a physical quantity comprising:
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a first substrate having a first principal surface and a first backside surface; a first element arranged on the first principal surface of the first substrate; a second substrate having a second principal surface and a second backside surface; and a second element arranged on the second principal surface of the second substrate; a first wiring layer, wherein the first principal surface of the first substrate faces and contacts the second backside surface of the second substrate so that an accommodation space is provided between the first substrate and the second substrate, wherein the second element on the second principal surface is opposite to the accommodation space, wherein the second substrate includes a first through hole, which penetrates the second substrate from the second principal surface and reaches the first element on the first principal surface, wherein the second substrate further includes a first through hole electrode, which is arranged in the first through hole via an insulation film, and wherein the first wiring layer is electrically coupled with the first though hole electrode. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification