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PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGMENT BETWEEN TWO LAYERS

  • US 20090231584A1
  • Filed: 04/22/2009
  • Published: 09/17/2009
  • Est. Priority Date: 04/10/2001
  • Status: Active Grant
First Claim
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1. A target for measuring the relative positions between two layers of a device, said target comprising:

  • a first periodic structure over a first layer of the device; and

    a second periodic structure over a second layer of the device, said second periodic structure overlying or interlaced with said first periodic structure, wherein said second periodic structure includes a first and a second portion, wherein the first portion is in a region overlying the first periodic structure and the second portion is in a region not overlying the first periodic structure.

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