PERIODIC PATTERNS AND TECHNIQUE TO CONTROL MISALIGMENT BETWEEN TWO LAYERS
First Claim
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1. A target for measuring the relative positions between two layers of a device, said target comprising:
- a first periodic structure over a first layer of the device; and
a second periodic structure over a second layer of the device, said second periodic structure overlying or interlaced with said first periodic structure, wherein said second periodic structure includes a first and a second portion, wherein the first portion is in a region overlying the first periodic structure and the second portion is in a region not overlying the first periodic structure.
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Abstract
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
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Citations
7 Claims
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1. A target for measuring the relative positions between two layers of a device, said target comprising:
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a first periodic structure over a first layer of the device; and a second periodic structure over a second layer of the device, said second periodic structure overlying or interlaced with said first periodic structure, wherein said second periodic structure includes a first and a second portion, wherein the first portion is in a region overlying the first periodic structure and the second portion is in a region not overlying the first periodic structure. - View Dependent Claims (2)
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3. A target for measuring the relative positions between two layers of a device, said target comprising:
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a first periodic structure over a first layer of the device; and a second periodic structure over a second layer of the device, said second periodic structure overlying with said first periodic structure; wherein said first or periodic structure has at least two interlaced grating lines having different periods, line widths or duty cycles. - View Dependent Claims (4, 5)
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6. A method for detecting misalignment between a first periodic structure and a second periodic structure of a device, said second periodic structure overlying or interlaced with said first periodic structure, comprising:
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measuring critical dimensions of the first and second periodic structures, wherein measurement of at least one of the first and second periodic structures is performed without measuring the other one of the first and second periodic structures; and measuring the misalignment between the first and second periodic structures. - View Dependent Claims (7)
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Specification