Mirror device with an anti-stiction layer
First Claim
Patent Images
1. A micromirror device, comprising:
- an elastic hinge for supporting a mirror on a substrate;
an address electrode for deflecting the mirror;
a protective layer provided to cover the address electrode; and
a stopper portion, provided on a surface of the protective layer, for determining a deflection angle of the mirror, whereinan oriented monolayer is laid at least on the stopper portion.
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Abstract
A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.
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Citations
20 Claims
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1. A micromirror device, comprising:
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an elastic hinge for supporting a mirror on a substrate; an address electrode for deflecting the mirror; a protective layer provided to cover the address electrode; and a stopper portion, provided on a surface of the protective layer, for determining a deflection angle of the mirror, wherein an oriented monolayer is laid at least on the stopper portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A micromirror device producing method, comprising the process of forming:
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an elastic hinge for supporting a mirror on a substrate; an address electrode for deflecting the mirror; a protective layer provided to cover the address electrode; and a stopper portion, provided on a surface of the protective layer, for determining a deflection angle of the mirror, wherein an oriented monolayer is formed at least on the stopper portion in the elastic hinge, the address electrode, the protective layer, and the stopper portion; and when the oriented monolayer is formed, the oriented monolayer is laid in a normal temperature. - View Dependent Claims (12, 13)
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14. A micromirror device producing method, comprising the process of:
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forming a stopper portion for determining a deflection angle of a mirror on a substrate; forming a protective layer for covering at least the stopper portion; and forming an oriented monolayer on the protective layer in a normal temperature. - View Dependent Claims (15, 16, 17)
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18. A micromechanical device, wherein:
a stopper portion contacting a movable member has an oriented monolayer of a material of CF3(CF2)x(CH2)ySi(CH3)nCl3−
n (0≦
n≦
2).- View Dependent Claims (19, 20)
Specification