ELECTRICALLY CONDUCTIVE PROTECTION LAYER AND A MICROELECTROMECHANICAL DEVICE USING THE SAME
First Claim
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1. A method of making a micromirror device, comprising:
- providing a substrate having an electrode formed thereon;
forming a sacrificial layer comprising a sacrificial material on the substrate;
forming a deformable hinge on the sacrificial layer;
forming a protective layer on a surface of the deformable hinge, wherein the protective layer is electrically conductive;
forming a second sacrificial layer on the deformable hinge;
forming a mirror plate on the second sacrificial layer;
performing an etching process using an etchant to remove the first and the second sacrificial layers, wherein the protective layer is more resistant to the etching process than the deformable hinge.
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Abstract
A deformable hinge for use in microelectromechanical devices comprises a protection layer that is electrically conductive. The protection layer is on top of another hinge layer; and is more resistive than the hinge layer to the etchant used in during patterning and/or release processes during fabrication of the microelectromechanical device. As a result, the hinge layer can be protected from being damaged during the fabrication process.
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Citations
25 Claims
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1. A method of making a micromirror device, comprising:
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providing a substrate having an electrode formed thereon; forming a sacrificial layer comprising a sacrificial material on the substrate; forming a deformable hinge on the sacrificial layer; forming a protective layer on a surface of the deformable hinge, wherein the protective layer is electrically conductive; forming a second sacrificial layer on the deformable hinge; forming a mirror plate on the second sacrificial layer; performing an etching process using an etchant to remove the first and the second sacrificial layers, wherein the protective layer is more resistant to the etching process than the deformable hinge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 9, 10, 11)
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12. The method of 10, wherein the protective layer is formed on a top surface of the deformable hinge;
- and said another protective layer is formed on a bottom surface of the deformable hinge; and
wherein the protective layer is electrically connected to the mirror plate; and
said another protective layer is electrically connected to the electrode on the substrate.
- and said another protective layer is formed on a bottom surface of the deformable hinge; and
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13. A micromirror device, comprising:
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a substrate having an electrode and a hinge connection pad formed thereon; a deformable hinge held above the substrate, comprising; an intermediate hinge layer laminated between a top and a bottom hinge layer, wherein the top and the bottom hinge layers comprise an electrically conductive material that is different from the material of the intermediate hinge layer; a mirror plate attached to the deformable hinge such that the mirror plate is capable of moving above the substrate; and wherein the mirror plate is electrically connected to the top hinge layer through a mirror post; and
the bottom hinge layer is electrically connected to the hinge connection pad. - View Dependent Claims (14, 15, 16, 17)
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18. A method of making a micromirror device, the method comprising:
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providing a substrate having formed thereon an electrical circuit; depositing and patterning a first sacrificial layer on the substrate; forming a deformable hinge on the first sacrificial layer, comprising; depositing a bottom hinge layer on the first sacrificial layer; depositing an intermediate hinge layer on the bottom hinge layer; depositing a top hinge layer on the intermediate hinge layer; patterning the bottom, the intermediate, and the top hinge layers, together or separately, so as to form the deformable hinge; depositing a second sacrificial layer on the patterned deformable hinge; forming a mirror plate on the second sacrificial layer; and removing the first and the second sacrificial layers so as to release the micromirror device. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification