×

Adjustable solubility in sacrificial layers for microfabrication

  • US 20090236310A1
  • Filed: 04/14/2006
  • Published: 09/24/2009
  • Est. Priority Date: 04/14/2005
  • Status: Active Grant
First Claim
Patent Images

1. A method for microfabrication or other small-scale fabrication process, comprising:

  • forming a sacrificial material comprising a polymer on a substrate, the polymer having a solubility with respect to at least one solvent used in the fabrication process;

    treating the polymer with a bivalent ion to alter the solubility of the polymer with respect to the solvent to the extent that the treated polymer is prevented from removal by the solvent in the fabrication process, by the presence of the bivalent ion;

    carrying out a fabrication process involving the solvent, using the polymer as sacrificial material; and

    removing the polymer at least in part by dissolving the polymer in the solvent.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×