Adjustable solubility in sacrificial layers for microfabrication
First Claim
1. A method for microfabrication or other small-scale fabrication process, comprising:
- forming a sacrificial material comprising a polymer on a substrate, the polymer having a solubility with respect to at least one solvent used in the fabrication process;
treating the polymer with a bivalent ion to alter the solubility of the polymer with respect to the solvent to the extent that the treated polymer is prevented from removal by the solvent in the fabrication process, by the presence of the bivalent ion;
carrying out a fabrication process involving the solvent, using the polymer as sacrificial material; and
removing the polymer at least in part by dissolving the polymer in the solvent.
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Abstract
The present invention provides fabrication methods using sacrificial materials comprising polymers. In some embodiments, the polymer may be treated to alter its solubility with respect to at least one solvent (e.g., aqueous solution) used in the fabrication process. The preparation of the sacrificial materials is rapid and simple, and dissolution of the sacrificial material can be carried out in mild environments. Sacrificial materials of the present invention may be useful for surface micromachining, bulk micromachining, and other microfabrication processes in which a sacrificial layer is employed for producing a selected and corresponding physical structure.
113 Citations
31 Claims
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1. A method for microfabrication or other small-scale fabrication process, comprising:
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forming a sacrificial material comprising a polymer on a substrate, the polymer having a solubility with respect to at least one solvent used in the fabrication process; treating the polymer with a bivalent ion to alter the solubility of the polymer with respect to the solvent to the extent that the treated polymer is prevented from removal by the solvent in the fabrication process, by the presence of the bivalent ion; carrying out a fabrication process involving the solvent, using the polymer as sacrificial material; and removing the polymer at least in part by dissolving the polymer in the solvent. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 25, 26)
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12. A method for microfabrication or other small-scale fabrication process, comprising:
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forming a sacrificial material comprising a polymer on a substrate, wherein the polymer is soluble in aqueous solution; treating the sacrificial material with a bivalent ion such that the polymer becomes substantially insoluble in aqueous solution; removing the bivalent ion from the sacrificial material such the polymer becomes soluble in aqueous solution; and removing the sacrificial material. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 27, 28, 29)
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21. A method for microfabrication or other small-scale fabrication process, comprising:
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forming a sacrificial material comprising poly(acrylic acid) on a substrate, wherein the poly(acrylic acid) is associated with a univalent ion and the sacrificial material is soluble in aqueous solution, treating the sacrificial material with a bivalent ion, such that the poly(acrylic acid) becomes associated with the bivalent ion and the sacrificial material becomes substantially insoluble in aqueous solution; carrying out a fabrication process, using the poly(acrylic acid) as sacrificial material; and removing the bivalent ion from the poly(acrylic acid) such the sacrificial material becomes soluble in aqueous solution; and removing the sacrificial material. - View Dependent Claims (22, 23, 24)
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30. A method for microfabrication or other small-scale fabrication process, comprising:
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forming a sacrificial material comprising a polymer on a substrate, wherein the sacrificial material comprises a first portion and a second portion and wherein the polymer is soluble in aqueous solution; treating the first portion of the sacrificial material with a bivalent ion such that the polymer becomes substantially insoluble in aqueous solution, without similarly treating the second portion; and removing the second portion of the sacrificial material. - View Dependent Claims (31)
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Specification