WAFER TESTING SYSTEM INTEGRATED WITH RFID TECHNIQUES AND THESTING METHOD THEREOF
First Claim
1. A wafer testing system integrated with radio frequency identification (RFID) techniques, comprising:
- a wafer storage section, for storing at least a carrier loaded with a plurality of wafers;
a prober, comprising a movable stage, a probe card clamping mechanism and a probe card, wherein the movable stage is used to support a wafer to be tested and move the wafer along X, Y and Z axes while the probe card is clamped by the probe card clamping mechanism; and
a tester, for sending a test signal to the prober so as to conduct a testing process on said wafer and, when the testing process is completed, calling an interface program to convert a test result of said wafer into a file conforming to a specific data format;
wherein the wafer testing system is characterized in;
the carrier being provided with at least one RFID tag;
the prober being provided with an RFID reader for reading a tag info stored in the RFID tag;
an RFID middleware unit being provided to receive the tag info read by the RFID reader and calling related applications so as to generate a corresponding wafer info;
an engineering data analysis (EDA) system being provided to receive and process the file in the specific data format converted by the interface program so as to generate a yield info of said wafer; and
a manufacturing execution system (MES system) being provided to integrate the wafer info from the RFID middleware unit with the yield info from the EDA system to allow a real-time wafer-based monitoring process.
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Abstract
This invention provides a wafer testing system and testing method thereof. The wafer testing system comprises a wafer storage section, a prober, a tester, an RFID middleware unit, an EDA system and an MES system. The wafer storage section stores a multiplicity of carriers, each of which is provided with at least a RFID tag. The prober comprises a RFID reader to read a tag information. The tester sends a test signal to the prober for implementing the wafer test so as to generate a test result and calls an interface program to convert the test result into a file conformed with a specific data format. The RFID middleware unit receives the tag information and calls related applications to process the tag information so as to generate a wafer information. The EDA system receives the file of the specific data format converted from the interface program and calculates thereof to generate a wafer yield information after wafer test. The MES system integrates the wafer information from the RFID middleware unit with the yield information from the EDA system so as to allow monitoring the wafer manufacturing process and testing yield rate in a real-time manner.
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Citations
15 Claims
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1. A wafer testing system integrated with radio frequency identification (RFID) techniques, comprising:
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a wafer storage section, for storing at least a carrier loaded with a plurality of wafers; a prober, comprising a movable stage, a probe card clamping mechanism and a probe card, wherein the movable stage is used to support a wafer to be tested and move the wafer along X, Y and Z axes while the probe card is clamped by the probe card clamping mechanism; and a tester, for sending a test signal to the prober so as to conduct a testing process on said wafer and, when the testing process is completed, calling an interface program to convert a test result of said wafer into a file conforming to a specific data format; wherein the wafer testing system is characterized in; the carrier being provided with at least one RFID tag; the prober being provided with an RFID reader for reading a tag info stored in the RFID tag; an RFID middleware unit being provided to receive the tag info read by the RFID reader and calling related applications so as to generate a corresponding wafer info; an engineering data analysis (EDA) system being provided to receive and process the file in the specific data format converted by the interface program so as to generate a yield info of said wafer; and a manufacturing execution system (MES system) being provided to integrate the wafer info from the RFID middleware unit with the yield info from the EDA system to allow a real-time wafer-based monitoring process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A wafer testing method integrated with RFID techniques, comprising steps of:
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providing a wafer storage section for storing a carrier loaded with a plurality of wafers; providing a prober which comprises a movable stage, a probe card clamping mechanism and a probe card, wherein the movable stage is used to support a wafer to be tested and move the wafer along X, Y and Z axes while the probe card is clamped by the probe card clamping mechanism; and providing a tester for sending a test signal to the prober so as to conduct a test on said wafer and, when the test is completed, calling an interface program to convert a test result of said wafer into a file conforming to a specific data format; wherein the method is characterized in further comprising steps of; providing the carrier with at least one RFID tag; providing the prober with an RFID reader for reading a tag info stored in the RFID tag; providing an RFID middleware unit for receiving the tag info read by the RFID reader and calling related applications so as to generate a corresponding wafer info; providing an EDA system for receiving and processing the file in the specific data format converted by the interface program so as to generate a yield info of said wafer; and providing an MES system for integrating the wafer info from the RFID middleware unit with the yield info from the EDA system to allow a real-time wafer-based monitoring process.
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Specification