ELECTRON-EMITTING DEVICE, ELECTRON SOURCE, AND IMAGE DISPLAY APPARATUS, AND METHOD FOR MANUFACTURING THE SAME

• US 20090237570A1
• Filed: 06/29/2007
• Published: 09/24/2009
• Est. Priority Date: 07/25/2006
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Nukanobu, Koki, Sato, Takahiro, Tsukamoto, Takeo, Moriguchi, Takuto
• Granted Patent: US 8,013,509 B2
• Time in Patent Office: Days
• US Class Current: 348/725
• CPC Class Codes: H01J 1/316 having an electric field parallel to the surface, e.g. thin film cathodes
• CPC Class Codes: H01J 2201/3165 Surface conduction emission type cathodes
• CPC Class Codes: H01J 31/127 using large area or array sources, i.e. essentially a source for each pixel group
• CPC Class Codes: H01J 9/027 of thin film cathodes

Abstract

A base body includes a first part and a second part, The second part has a lower thermal conductivity than the first part and is arranged adjacently to the first part. A first conductive film is formed on the first part and a second conductive film is formed on the second part. At least part of a gap is located above a boundary between the first part and the second part.

Claims

1. An electron-emitting device comprising a first conductive film and a second conductive film that are arranged on a base body with a gap between them and in which an electric potential of the second conductive film is made higher than an electric potential of the first conductive film to emit an electron,

wherein the base body includes a first part and a second part, the second part having a lower thermal conductivity than the first part and being arranged adjacently to the first part;

wherein the first conductive film is formed on the first part and the second conductive film is formed on the second part; and

wherein at least part of the gap is located above a boundary between the first part and the second part.

3. An electron-emitting device according to claim 1, wherein the first part and the second part are of higher resistance than the conductive films and wherein the conductive films are arranged on the first part and the second part.

4. An electron-emitting device according to claim 1, wherein the first conductive film includes a first electrode and a first carbon film;

and wherein the second conductive film includes at least a second electrode, which is arranged separately from the first electrode, and a second carbon film which is arranged separately from the first carbon film.

5. An electron-emitting device according to claim 1, wherein material constructing the first part and the second part has a resistivity of 10⁸ Ω

m or more.

6. An electron-emitting device according to claim 1, wherein a sheet resistance of the conductive film is 10²Ω

/□

or more and 10⁷Ω

/□

or less.

7. An electron-emitting device according to claim 1, wherein the first part has silicon oxide as a main component.

8. An electron source comprising a plurality of electron-emitting devices, wherein the electron-emitting devices are electron-emitting devices according to claim 1.

9. An image display apparatus comprising an electron source and a light-emitting member that emits light when it is irradiated with an electron emitted from the electron source, wherein the electron source is an electron source according to claim 8.

10. An information reproducing apparatus comprising at least a receiver that outputs at least one of image information, character information, and voice information, which are included in a received broadcast signal, and an image display apparatus connected to the receiver, wherein the image display apparatus is the image display apparatus according to claim 9.

2. An electron-emitting device comprising a first conductive film and a second conductive film that are arranged separately from each other on a base body and in which an electric potential of the second conductive film is made higher than an electric potential of the first conductive film to emit an electron,

wherein the base body includes a first part and a second part, the second part having a lower thermal conductivity than the first part and being arranged adjacently to the first part;

wherein the first conductive film is formed on the first part and the second conductive film is formed on the second part; and

wherein at least part of a boundary between the first part and the second part is located between the first conductive film and the second conductive film.

13. An electron-emitting device according to claim 2, wherein the first part and the second part are of higher resistance than the conductive films and wherein the conductive films are arranged on the first part and the second part.

14. An electron-emitting device according to claim 2, wherein the first conductive film includes a first electrode and a first carbon film;

and wherein the second conductive film includes at least a second electrode, which is arranged separately from the first electrode, and a second carbon film which is arranged separately from the first carbon film.

15. An electron-emitting device according to claim 2, wherein material constructing the first part and the second part has a resistivity of 10⁸ Ω

m or more.

16. An electron-emitting device according to claim 2, wherein a sheet resistance of the conductive film is 10²Ω

/□

or more and 10⁷Ω

/□

or less.

17. An electron-emitting device according to claim 2, wherein the first part has silicon oxide as a main component.

18. An electron source comprising a plurality of electron-emitting devices, wherein the electron-emitting devices are electron-emitting devices according to claim 2.

19. An image display apparatus comprising an electron source and a light-emitting member that emits light when it is irradiated with an electron emitted from the electron source, wherein the electron source is an electron source according to claim 18.

20. An information reproducing apparatus comprising at least a receiver that outputs at least one of image information, character information, and voice information, which are included in a received broadcast signal, and an image display apparatus connected to the receiver, wherein the image display apparatus is the image display apparatus according to claim 19.

11. A method for manufacturing an electron-emitting device, comprising:

a first step for preparing a base body having a first electrode and a second electrode, the second electrode being arranged separately from the first electrode; and

a second step for applying a pulse voltage between the first electrode and the second electrode a plurality of times in an atmosphere containing gas containing carbon,

wherein the base body includes a first part and a second part, the second part having a lower thermal conductivity than the first part and being arranged adjacently to the first part;

wherein the first electrode and the second electrode are formed on the base body in such a way that a boundary between the first part and the second part is located between the first electrode and the second electrode; and

wherein a waveform of the pulse voltage includes a waveform that makes an electric potential of the first electrode higher than an electric potential of the second electrode and a waveform that makes the electric potential of the second electrode higher than the electric potential of the first electrode.

12. A method for manufacturing an image display apparatus comprising an electron source having a plurality of electron-emitting devices, and a light-emitting member that emits light when it is irradiated with an electron emitted from the electron source, wherein the electron-emitting device is manufactured by the method according to claim 11.