METHOD AND SYSTEM FOR A MEMS DETECTOR THAT ENABLES CONTROL OF A DEVICE USING HUMAN BREATH

• US 20090241686A1
• Filed: 03/26/2008
• Published: 10/01/2009
• Est. Priority Date: 03/26/2008
• Status: Active Grant

• Current Assignee: Pierre Bonnat
• Original Assignee: Pierre Bonnat
• Inventors: Bonnat, Pierre
• Granted Patent: US 8,976,046 B2
• Time in Patent Office: Days
• US Class Current: 73/861.80
• CPC Class Codes: G01F 1/28 by drag-force, e.g. vane type or impact flowmeter
• CPC Class Codes: G01P 5/02 by measuring forces exerted by the fluid on solid bodies, e.g. anemometer
• CPC Class Codes: G06F 3/011 Arrangements for interaction with the human body, e.g. for user immersion in virtual reality blind teaching G09B21/00

Abstract

Methods and systems for a MEMS detector that enables control of a device using human breath are disclosed and may include detecting air flow caused by human breath via a microelectromechanical systems (MEMS) detector, which may include deflectable members operable to detect the movement of air. The deflection of the members may be limited via a spacer within the MEMS detector. The amount of deflection may be determined by measuring reflected light signals, piezoelectric signals, capacitance changes, or current generated by the deflection in a magnetic field. Output signals may be generated based on the detected movement. The MEMS detector may include a substrate, a spacer, and the MEMS deflectable members. The substrate may include a ceramic material and/or silicon, and may include embedded devices and interconnects. An integrated circuit may be electrically coupled to the substrate. Air flows may be directed out of the side of the MEMS detector.

Claims

1. A method for wireless communication, the method comprising:

detecting movement of air caused by expulsion of human breath via a microelectromechanical systems (MEMS) detector.

2. The method according to claim 1, wherein said MEMS detector comprises one or more deflectable members operable to detect said movement of air caused by said expulsion of human breath.

3. The method according to claim 2, comprising limiting deflection of said deflectable members via a spacer within said MEMS detector.

4. The method according to claim 2, comprising determining an amount of said deflection of said deflectable members by measuring light signals reflected off of said MEMS deflectable members.

5. The method according to claim 2, comprising determining an amount of said deflection of said deflectable members by measuring piezoelectric signals generated by said deflection of said deflectable members.

6. The method according to claim 2, comprising determining an amount of said deflection of said deflectable members by measuring capacitance changes generated by said deflection of said deflectable members.

7. The method according to claim 2, comprising determining an amount of said deflection of said deflectable members by measuring current generated by said deflection of said deflected members in a magnetic field.

8. The method according to claim 1, comprising directing air flows out the side of said MEMS detector.

9. The method according to claim 1, comprising generating one or more output signals based on said detected movement.

10. The method according to claim 1, wherein said MEMS detector comprises a substrate, a spacer, and said one or more MEMS deflectable members.

11. The method according to claim 10, wherein said substrate comprises a ceramic material and/or silicon.

12. The method according to claim 10, wherein said substrate comprises embedded devices and interconnects.

13. The method according to claim 10, wherein an integrated circuit is electrically coupled to said substrate.

14. A system for wireless communication, the system comprising:

one or more microelectromechanical systems (MEMS) detectors for detecting movement of air caused by expulsion of human breath.

15. The system according to claim 14, wherein said MEMS detector comprises one or more deflectable members operable to detect said movement of air caused by said expulsion of human breath.

16. The system according to claim 15, wherein said deflection of said deflectable members is limited via a spacer within said MEMS detector.

17. The system according to claim 15, wherein said one or more microelectromechanical systems (MEMS) detectors determine said deflection of said deflectable members by measuring light signals reflected off of said MEMS deflectable members.

18. The system according to claim 15, wherein said one or more microelectromechanical systems (MEMS) detectors determine said deflection of said deflectable members by measuring piezoelectric signals generated by said deflection of said deflectable members.

19. The system according to claim 15, wherein said one or more microelectromechanical systems (MEMS) detectors determine said deflection of said deflectable members by measuring capacitance changes generated by said deflection of said deflectable members.

20. The system according to claim 15, wherein said one or more microelectromechanical systems (MEMS) detectors determine said deflection of said deflectable members by measuring current generated by said deflection of said deflected members in a magnetic field.

21. The system according to claim 14, wherein said movement of air flows out the side of said one or more microelectromechanical systems (MEMS) detectors.

22. The system according to claim 14, wherein said one or more microelectromechanical systems (MEMS) detectors generating one or more output signals based on said detected movement.

23. The system according to claim 14, wherein said one or more microelectromechanical systems (MEMS) detectors comprises a substrate, a spacer, and said one or more MEMS deflectable members.

24. The system according to claim 23, wherein said substrate comprises a ceramic material and/or silicon.

25. The system according to claim 23, wherein said substrate comprises embedded devices and interconnects.

26. The system according to claim 23, wherein an integrated circuit comprising one or more circuits is electrically coupled to said substrate.

27. The system according to claim 26, wherein said one or more circuits are disposed within and/or on said substrate.

28. A MEMS air flow detector, said MEMS air flow detector comprising:

one or more deflectable members;

a spacer situated beneath said deflectable members;

a substrate comprising one or more layers of conducting, semiconducting, and/or insulating layers;

one or more deflection detectors in individual cavities beneath each of said deflectable members; and

an integrated circuit electrically coupled to said substrate and said deflection detectors.

29. The system according to claim 28, wherein said deflection detectors comprise a light source and one or more photodiodes.

30. The system according to claim 28, wherein said conducting, semiconducting, and/or insulating layers comprise embedded devices and/or interconnects electrically coupled to said integrated circuit and said deflection detectors.

31. The system according to claim 28, wherein said deflection detectors utilize one or more of:

piezoelectric, ultrasonic, Hall effect, capacitance, magnetic and/or electromagnetic field measurement techniques.

32. The system according to claim 28, wherein said spacer defines said individual cavities beneath each of said deflectable members.

33. The system according to claim 28, wherein said substrate defines a bottom surface for said individual cavities.

34. The system according to claim 28, wherein said spacer defines a deflection limit for said deflectable members.