PHOTONIC MILLING USING DYNAMIC BEAM ARRAYS
First Claim
1. A laser processing system comprising:
- a beam positioning system to align beam delivery coordinates relative to a workpiece, the beam positioning system generating position data corresponding to the alignment;
a pulsed laser source;
a beamlet generation module to receive a laser pulse from the pulsed laser source, and to generate from the laser pulse a beamlet array comprising a plurality of beamlet pulses;
a beamlet modulator to modulate the amplitude of each beamlet pulse in the beamlet array; and
beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.
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Accused Products
Abstract
A laser processing system includes a beam positioning system to align beam delivery coordinates relative to a workpiece. The beam positioning system generates position data corresponding to the alignment. The system also includes a pulsed laser source and a beamlet generation module to receive a laser pulse from the pulsed laser source. The beamlet generation module generates a beamlet array from the laser pulse. The beamlet array includes a plurality of beamlet pulses. The system further includes a beamlet modulator to selectively modulate the amplitude of each beamlet pulse in the beamlet array, and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.
72 Citations
22 Claims
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1. A laser processing system comprising:
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a beam positioning system to align beam delivery coordinates relative to a workpiece, the beam positioning system generating position data corresponding to the alignment; a pulsed laser source; a beamlet generation module to receive a laser pulse from the pulsed laser source, and to generate from the laser pulse a beamlet array comprising a plurality of beamlet pulses; a beamlet modulator to modulate the amplitude of each beamlet pulse in the beamlet array; and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for processing a workpiece with a laser, the method comprising:
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generating a laser pulse; generating, from the laser pulse, a beamlet array comprising a plurality of beamlet pulses; modulating the amplitude of each beamlet pulse in the beamlet array; and focusing the modulated beamlet array onto one or more target locations on the workpiece. - View Dependent Claims (20, 21, 22)
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Specification