Robust optical filter utilizing pairs of dielectric and metallic layers
First Claim
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1. A method of providing an optical filter comprising:
- forming a layer stack on a substrate to include pairs of dielectric and metallic layers, including defining each said pair by;
forming a transparent dielectric film as a first film of said dielectric layer, said transparent dielectric film having a refractive index of at least 1.1;
forming a zinc-based film as a second film of said dielectric layer, said zinc-based film having a zinc content of at least 80 percent and having a thickness of at least 15 nm; and
forming a silver-based film as said metallic layer, said silver-based film being in contact with said zinc-based film.
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Abstract
“Corrosion” performance of an optical filter is enhanced when a relatively thick zinc-based film functions as a seed layer for a subsequently formed silver-based film. At least two pairs of dielectric and metallic layers are included within the optical filter, where the zinc-based film is a second film of the dielectric layer and where the silver-based film is the metallic layer. The zinc-based film has a zinc content of at least 80 percent and has a thickness of at least 15 nm. In order to further improve the corrosion performance, gold may be incorporated into the silver-based film.
20 Citations
17 Claims
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1. A method of providing an optical filter comprising:
forming a layer stack on a substrate to include pairs of dielectric and metallic layers, including defining each said pair by; forming a transparent dielectric film as a first film of said dielectric layer, said transparent dielectric film having a refractive index of at least 1.1; forming a zinc-based film as a second film of said dielectric layer, said zinc-based film having a zinc content of at least 80 percent and having a thickness of at least 15 nm; and forming a silver-based film as said metallic layer, said silver-based film being in contact with said zinc-based film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A filtering arrangement comprising:
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a transparent substrate; and a layer stack on said substrate, said layer stack including pairs of dielectric and metallic layers, each said pair being defined by; a transparent dielectric film as a first film of said dielectric layer, said transparent dielectric layer having a refractive index of at least 1.1; a zinc-based film as a second film of said dielectric layer, said zinc-based film having a zinc content of at least 80 percent and having a thickness in the range of 15 nm to 40 nm; and a silver gold film as said metallic layer, said silver gold film being in contact with said zinc-based film. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification