OSCILLATING MASS RESONATOR
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Abstract
Suspension and coupling beams of oscillating masses in a device which serves, for example, as a gyro and that includes oscillating masses form a single continuous network that allows the device to have a compact design. Preferably, a junction beam surrounds the two masses.
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Citations
26 Claims
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1-13. -13. (canceled)
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14. :
- A resonator comprising;
a substrate; at least two oscillating masses; means for making the masses oscillate using electrical forces, suspension beams for suspending the masses from the substrate, and coupling beams that link the masses together, wherein the suspension beams are all connected to the masses through the coupling beams, with the suspension beams and the coupling beams forming a continuous single assembly of beams that includes attachment beams to the substrate and attachment beams to the masses, wherein the continuous single assembly of beams also includes a junction beam that undergoes deformation according to oscillation of the masses, extending along a closed line to which the attachment beams to the substrate and the attachment beams to the masses are connected. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
- A resonator comprising;
Specification