Optical System for Transforming Numerical Aperture
First Claim
Patent Images
1. A system comprising:
- an optical element that comprises a pupil defining element configured to receive a beam from a radiation source and to produce a pupil defined beam, including a plurality of beams, therefrom; and
a relay having a first and second lens arrays arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams into a plurality of corresponding beams in an image plane, each of the plurality of corresponding beams having a numerical aperture less than a numerical aperture of each of the plurality of beams.
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Abstract
A system is provided to form illumination light beams having desirable divergence and directivity. For instance, the system can include an optical element and a relay. The optical element can include a pupil defining element. Further, the relay can have a first and second lens array arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams into a corresponding plurality of beams in an image plane. Each of the plurality of corresponding beams can have a numerical aperture less than a numerical aperture of each of the plurality of beams.
28 Citations
20 Claims
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1. A system comprising:
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an optical element that comprises a pupil defining element configured to receive a beam from a radiation source and to produce a pupil defined beam, including a plurality of beams, therefrom; and a relay having a first and second lens arrays arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams into a plurality of corresponding beams in an image plane, each of the plurality of corresponding beams having a numerical aperture less than a numerical aperture of each of the plurality of beams. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An system comprising:
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an optical element that comprises a field defining element configured to receive a beam and generate a field defined beam, including a plurality of beams, therefrom; a first relay having a first and second lens arrays arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams into a plurality of corresponding beams in an image plane, the plurality of corresponding beams having a numerical aperture less than a numerical aperture of each of the plurality of beams; and a second relay having a third and fourth lens arrays arranged in series and configured to receive the field defined beam and to generate another plurality of corresponding beams therefrom, each of the another plurality of corresponding beams having a numerical aperture less than a numerical aperture of the field defined beam. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An system comprising:
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an optical element that comprises a pupil defining element configured to receive a beam and to generate a plurality of beams, therefrom; a relay having a first and second lens arrays arranged in series and configured to receive the plurality of beams and to re-image the plurality of beams onto an image plane as a plurality of corresponding beams, each of the plurality of corresponding beams having a numerical aperture less than a numerical aperture of each of the plurality of beams; and an optical system located after the relay and configured to condition the plurality of corresponding beams. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification