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METHOD OF EVALUATING OPTICAL PERFORMANCE OF OPTICAL SYSTEM

  • US 20090254305A1
  • Filed: 04/06/2009
  • Published: 10/08/2009
  • Est. Priority Date: 04/08/2008
  • Status: Abandoned Application
First Claim
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1. A method of evaluating an optical performance of an optical system, the method comprising:

  • a locating step of locating a plurality of circular regions in an evaluated region on an optical element included in the optical system;

    a fitting step of fitting a polynomial to surface shape data representing a surface shape of the optical element in each of the plurality of circular regions; and

    a calculation step of calculating the optical performance of the optical system based on the fitting result obtained in the fitting step in each of the plurality of circular regions.

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