APPARATUS STRUCTURE AND SCANNING PROBE MICROSCOPE INCLUDING APPARATUS STRUCTURE

• US 20090255016A1
• Filed: 03/31/2009
• Published: 10/08/2009
• Est. Priority Date: 04/03/2008
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Science Corporation (Hitachi, Ltd.)
• Original Assignee: SII NanoTechnology Inc. (Hitachi, Ltd.)
• Inventors: Wakiyama, Shigeru, Akamatsu, Kenichi
• Granted Patent: US 7,945,964 B2
• Time in Patent Office: Days
• US Class Current: 850/33
• CPC Class Codes: G01Q 70/04 with compensation for temperature or vibration induced errors

Abstract

Provided are a structure of an apparatus for analysis, inspection, and measurement in which a support structure supporting a detection unit is resistant to disturbance, suppresses a reduction in resolution during large-sample measurement, and has high rigidity, and a probe microscope using the apparatus structure. The apparatus structure supporting the detection unit which is opposed to a sample which is located on a unit movable in at least one axis direction and is an object to be analyzed has an arch shape. In the apparatus structure having the arch shape and supporting the detection unit, a surface substantially perpendicular to a flat surface portion of a sample holder located immediately under the apparatus structure is formed. The detection unit is supported on the perpendicular surface. The arch-shaped apparatus structure is a curved structure consistent with a catenary curve.

Claims

1. A structure of an apparatus for performing analysis, inspection, and measurement, comprising:

a sample holder on which a sample which is an object to be analyzed, inspected, and measured is located;

a sample stage on which the sample holder is located;

a support structure member having an arch shape;

detection means for detecting a detection value for analysis, inspection, and measurement, the detection means being opposed to the sample and supported on a perpendicular surface which is formed, in a member thickness direction, in a portion of the support structure member having the arch shape and which is substantially perpendicular to a flat surface portion of the sample holder; and

moving means for finely moving the sample stage in at least one axis direction.

2. An apparatus structure according to claim 1, wherein the arch shape of the support structure member is formed with a curve consistent with a catenary curve.

3. An apparatus structure according to claim 1, wherein the support structure member which supports the detection means and has the arch shape is integrally formed.

4. An apparatus structure according to claim 1, wherein the perpendicular surface is formed, in a member thickness direction, in a side surface portion of a hole portion formed in an upper bottom portion of the support structure member having the arch shape.

5. A scanning probe microscope, comprising the apparatus structure according to claim 1.