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SYSTEMS AND METHODS FOR ACCELERATION AND ROTATIONAL DETERMINATION FROM AN IN-PLANE AND OUT-OF-PLANE MEMS DEVICE

  • US 20090255336A1
  • Filed: 07/31/2008
  • Published: 10/15/2009
  • Est. Priority Date: 04/10/2008
  • Status: Active Grant
First Claim
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1. A method of sensing linear accelerations and rotations of a Micro-Electro-Mechanical Systems (MEMS) sensor comprising a first proof mass and a second proof mass aligned in an in-plane axis, a first out-of-plane electrode pair with the first proof mass disposed therebetween, a second out-of-plane electrode pair with the second proof mass disposed therebetween, a first in-plane sense comb with a plurality of comb fingers interleaved with opposing first proof mass comb fingers, and a second in-plane sense comb with a plurality of comb fingers interleaved with the opposing second proof mass comb fingers, the method comprising:

  • sensing an out-of-plane linear acceleration of the MEMS sensor with the first out-of-plane electrode pair and the second out-of-plane electrode pair;

    sensing an in-plane rotation of the MEMS sensor with the first out-of-plane electrode pair and the second out-of-plane electrode pair;

    sensing an in-plane linear acceleration of the MEMS sensor with the first in-plane sense comb and the second in-plane sense comb; and

    sensing an out-of-plane rotation of the MEMS sensor with the first in-plane sense comb and the second in-plane sense comb.

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