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RESONANT ACCELEROMETER WITH LOW SENSITIVITY TO PACKAGE STRESS

  • US 20090255339A1
  • Filed: 04/14/2008
  • Published: 10/15/2009
  • Est. Priority Date: 04/14/2008
  • Status: Active Grant
First Claim
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1. A resonant accelerometer comprising:

  • a substrate;

    an anchor formed on a surface of said substrate;

    a proof mass positioned in parallel spaced apart relationship above said surface of said substrate, said proof mass having a central opening defined by an inner peripheral wall, said central opening extending through said proof mass; and

    suspension beams residing in said central opening, each of said suspension beams having one end affixed to said anchor and having another end attached to said proof mass at said inner peripheral wall.

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