MEMS DEVICE HAVING A LAYER MOVABLE AT ASYMMETRIC RATES

• US 20090256218A1
• Filed: 06/19/2009
• Published: 10/15/2009
• Est. Priority Date: 02/23/2006
• Status: Abandoned Application

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Mignard, Marc, Kogut, Lior
• Application Number:
  US12/488,366
• Publication Number:
  US 20090256218A1
• Time in Patent Office: Days
• US Class Current: 257/419
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2201/054 Microvalves
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 2300/06 Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
• CPC Class Codes: G09G 3/3466 based on interferometric effect

Claims