GEAR TOOTH SENSOR WITH SINGLE MAGNETORESISTIVE BRIDGE

• US 20090256552A1
• Filed: 04/10/2008
• Published: 10/15/2009
• Est. Priority Date: 04/10/2008
• Status: Active Grant

• Current Assignee: Headway Technologies Incorporated (TDK Corporation)
• Original Assignee: MagIC Technologies Inc (TDK Corporation)
• Inventors: Gorman, Grace, Guo, Yimin
• Granted Patent: US 7,619,407 B2
• Time in Patent Office: Days
• US Class Current: 324/207.210
• CPC Class Codes: G01B 7/30 for measuring angles or tapers; for testing the alignment of axes
• CPC Class Codes: G01D 5/147 influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other
• CPC Class Codes: G01P 3/488 delivered by variable reluctance detectors

Abstract

The invention discloses a rotation sensor suitable for gear wheels. MR (magneto-resistive) sensors are placed inside a zero field region generated by at least two permanent magnets. Said sensors are divided into two groups that are immersed in different locally generated magnetic environments. A differential signal taken between the two groups then senses the movement of the wheel'"'"'s teeth. A single wafer method for manufacturing the device is also briefly described.

Claims

1. A method to measure rotational speed of a toothed wheel whose teeth include ferromagnetic material, comprising:

providing at least two permanent magnets;

disposing said permanent magnets so as to form a zero field region;

placing in said zero field region an even number of MR (magneto-resistive) devices divided into equal-sized first and second groups;

arranging for said first group to be immersed in a different magnetic environment from that in which said second group is immersed, whereby said permanent magnets and said MR sensors, including said magnetic environments, together form a rotational speed detector; and

then placing said rotational speed detector near said toothed wheel whereby, when said toothed wheel rotates, a differential signal taken between said first and second groups of MR detectors may be used to determine at what rate teeth from said toothed wheel pass by said rotational speed detector.

2. The method of claim 1 wherein said MR devices are selected from the group consisting of GMR and MTJ devices.

3. The method of claim 1 further comprising:

inter-connecting said MR devices to form a Wheatstone bridge in which said first and second groups each contain a first MR device whose input comes from an external source and whose output is connected to a first output of said Wheatstone bridge and a second MR device whose input comes from an MR device not in said second MR device'"'"'s group and whose output is connected to a second output of said Wheatstone bridge;

magnetically shielding all members of said first group; and

leaving all members of said second group without magnetic shielding, whereby an enhanced differential signal is generated between said first and second groups.

4. The method of claim 1 further comprising:

inter-connecting said MR devices to form a Wheatstone bridge in which said first and second groups each contain a first MR device whose input comes from an external source and whose output is connected to a first output of said Wheatstone bridge and a second MR device whose input comes from an MR device not in said second MR device'"'"'s group and whose output is connected to a second output of said Wheatstone bridge;

immersing all members of said first group in a first locally generated magnetic field having a first direction; and

immersing all members of said second group in a second locally generated magnetic field having a second direction that is different from said first direction.

5. The method of claim 4 wherein said second direction is antiparallel to said first direction, whereby an enhanced differential signal is generated between said first and second groups.

6. The method of claim 4 wherein said first and second locally generated fields derive from a current through a single turn coiled conductor.

7. The method of claim 6 further comprising, passing an electric current pulse through said single coiled conductor to pre-set directions of magnetization of free layers in said MR devices along said first and second directions.

8. The method of claim 1 wherein exchange pinning fields are utilized to enable said rotational speed detector to be fabricated from, and on, a single wafer.

9. The method of claim 1 wherein each of said permanent magnets has a cross-sectional area in the range of from 0.5 to 50 sq. mm and a height in the range of from 0.5 to 20 mm.

10. The method of claim 1 wherein said permanent magnets each have a magnetization in the range of from 0.1 to 1.0 Telsa.

11. A detector to measure rotational speed of a toothed wheel whose teeth include ferromagnetic material, comprising:

at least two permanent magnets;

a zero field region generated by said permanent magnets;

located in said zero field region, an even number of MR (magneto-resistive) devices arranged in first and second groups;

said MR devices being inter-connected as a Wheatstone bridge in which said first and second groups each contain a first MR device whose input comes from an external source and whose output is connected to a first output of said Wheatstone bridge, and a second MR device whose input comes from an MR device not in said second MR device'"'"'s group and whose output is connected to a second output of said Wheatstone bridge; and

a magnetic shield for all members of said first group, there being no magnetic shielding for all members of said second group.

12. The detector described in claim 11 wherein said MR devices are selected from the group consisting of GMR and MTJ devices.

13. The detector described in claim 11 wherein each of said permanent magnets has a cross-sectional area in the range of from 0.5 to 50 sq. mm and a height in the range of from 0.5 to 20 mm.

14. The detector described in claim 11 wherein said permanent magnets each have a magnetization in the range of from 0.1 to 1.0 Telsa.

15. A detector to measure rotational speed of a toothed wheel whose teeth include ferromagnetic material, comprising:

at least two permanent magnets;

a zero field region generated by said permanent magnets;

located in said zero field region, an even number of MR (magneto-resistive) devices arranged in first and second groups;

said MR devices being inter-connected as a Wheatstone bridge in which said first and second groups each contain a first MR device whose input comes from an external source and whose output is connected to a first output of said Wheatstone bridge, and a second MR device whose input comes from an MR device not in said second MR device'"'"'s group and whose output is connected to a second output of said Wheatstone bridge;

all members of said first group being immersed in a first locally generated magnetic field having a first direction; and

all members of said second group being immersed in a second locally generated magnetic field having a second direction that is different from said first direction.

16. The detector described in claim 15 wherein said MR devices are selected from the group consisting of GMR and MTJ devices.

17. The detector described in claim 15 wherein said second direction is antiparallel to said first direction.

18. The detector described in claim 17 further comprising a single turn coiled conductor that, when energized, serves to provide said first and second locally generated fields.

19. The detector described in claim 15 wherein each of said permanent magnets has a cross-sectional area in the range of from 0.5 to 50 sq. mm and a height in the range of from 0.5 to 20 mm.

20. The detector described in claim 15 wherein said permanent magnets each have a magnetization in the range of from 0.1 to 1.0 Telsa.