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Mirror device comprising drive electrode equipped with stopper function

  • US 20090257110A1
  • Filed: 09/04/2008
  • Published: 10/15/2009
  • Est. Priority Date: 08/14/2004
  • Status: Active Grant
First Claim
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1. A mirror device, comprising:

  • a plurality of deflectable mirrors;

    an elastic member for deflectably supporting the mirror;

    a drive electrode for driving the mirror;

    a control circuit for giving electric charge to the drive electrode and controlling the deflecting direction of the mirror; and

    a substrate on which the drive electrode and the elastic member are formed, whereinthe drive electrode is placed within an area on the substrate the mirror is projected on,has an outer form constituted by sides approximately in parallel to the outer peripheral lines of the present mirror and by sides approximately parallel to the deflection axis of the present mirror, or a form obtained by dividing the aforementioned outer form into a plurality thereof, and also fills the role of a stopper for regulating the deflection angle of the mirror.

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