METHOD FOR PRODUCING ORGANIC THIN FILM BY USING FILM PHYSICAL PROPERTY IMPROVING PROCESS
First Claim
1. A method for producing an organic thin film for forming an organic thin film on a substrate surface, comprising at least a step (B) of allowing the substrate to contact with an organic solvent solution comprising a metal surfactant having at least one or more hydrolysable group or hydroxyl group, and a catalyst that can interact with the metal surfactant, wherein the method further comprises after the step B, a step (E1) of heating the substrate which has been in contact with the organic solvent solution at 100°
- C. to 150°
C.;
a step (E2) of immersing the substrate which has been in contact with the organic solvent solution in a warm water of 40°
C. or more and less than the boiling point;
or a step (E3) of allowing the substrate which has been in contact with the organic solvent solution to contact with a moisture vapor of 60°
C. to 150°
C.
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Accused Products
Abstract
The object of the present invention is to provide a method for producing an organic thin film which film properties such as heat resistance or durability are improved. It is a method for producing an organic thin film for forming an organic thin film on a substrate surface, comprising at least a step (B) of allowing the substrate to contact with an organic solvent solution comprising a metal surfactant having at least one or more hydrolysable group or hydroxyl group, and a catalyst that can interact with the metal surfactant, wherein the method further comprises after the step (B), a step (E1) of heating the substrate which has been in contact with the organic solvent solution at 100° C. to 150° C.; a step (E2) of immersing the substrate which has been in contact with the organic solvent solution in a warm water of 40° C. or more and less than the boiling point; or a step (E3) of allowing the substrate which has been in contact with the organic solvent solution to contact with a moisture vapor of 60° C. to 150° C.
8 Citations
24 Claims
-
1. A method for producing an organic thin film for forming an organic thin film on a substrate surface, comprising at least a step (B) of allowing the substrate to contact with an organic solvent solution comprising a metal surfactant having at least one or more hydrolysable group or hydroxyl group, and a catalyst that can interact with the metal surfactant, wherein the method further comprises after the step B, a step (E1) of heating the substrate which has been in contact with the organic solvent solution at 100°
- C. to 150°
C.;
a step (E2) of immersing the substrate which has been in contact with the organic solvent solution in a warm water of 40°
C. or more and less than the boiling point;
or a step (E3) of allowing the substrate which has been in contact with the organic solvent solution to contact with a moisture vapor of 60°
C. to 150°
C. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
- C. to 150°
Specification