FUZZY CONTROL METHOD FOR ADJUSTING A SEMICONDUCTOR MACHINE
First Claim
1. A fuzzy control method for adjusting a semiconductor machine, applied to a semiconductor machine in a semiconductor manufacturing process, the method comprising:
- providing a machine measurement parameter of a pre-semiconductor manufacturing process, a machine measurement parameter of the semiconductor manufacturing process, and a machine operation parameter of the semiconductor manufacturing process;
executing a fuzzy deciding operation and selecting a machine adjusting level of the semiconductor manufacturing process, the difference between the machine measurement parameter of the pre-semiconductor manufacturing process and the machine operation parameter of the semiconductor manufacturing process is defined as a parameter input value, the difference between the machine measurement parameter of the semiconductor manufacturing process and the machine operation parameter of the semiconductor manufacturing process is defined as another parameter input value, a parameter output value is defined, and a machine control parameter of the semiconductor manufacturing process is calculated and the machine control parameter is the parameter output value; and
determining whether the machine control parameter of the semiconductor manufacturing process surpasses an acceptable range, wherein, when the machine control parameter of the semiconductor manufacturing process surpasses the acceptable range, the above steps are repeated. When the machine control parameter of the semiconductor manufacturing process does not surpass the acceptable range, the machine control parameter of the semiconductor manufacturing process is used for adjusting the machine.
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Accused Products
Abstract
A method of fuzzy control for adjusting a semiconductor machine comprising: providing measurement values from first the “parameter of a pre-semiconductor manufacturing process”, second the “parameter of the semiconductor manufacturing process”, and third the “operation parameter of the semiconductor manufacturing process”; performing a fuzzy control to define two inputs and one output corresponding to the measurement values, wherein the difference between the first and third values, and the difference between the second and third values, forms the two inputs, then from the two inputs one target output is calculated by fuzzy inference; finally, determining if the target output is in or out of an acceptable range. Whereby the target output is the “machine control parameter of the semiconductor manufacturing process” and when within an acceptable range is used for adjusting the semiconductor machine.
42 Citations
22 Claims
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1. A fuzzy control method for adjusting a semiconductor machine, applied to a semiconductor machine in a semiconductor manufacturing process, the method comprising:
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providing a machine measurement parameter of a pre-semiconductor manufacturing process, a machine measurement parameter of the semiconductor manufacturing process, and a machine operation parameter of the semiconductor manufacturing process; executing a fuzzy deciding operation and selecting a machine adjusting level of the semiconductor manufacturing process, the difference between the machine measurement parameter of the pre-semiconductor manufacturing process and the machine operation parameter of the semiconductor manufacturing process is defined as a parameter input value, the difference between the machine measurement parameter of the semiconductor manufacturing process and the machine operation parameter of the semiconductor manufacturing process is defined as another parameter input value, a parameter output value is defined, and a machine control parameter of the semiconductor manufacturing process is calculated and the machine control parameter is the parameter output value; and determining whether the machine control parameter of the semiconductor manufacturing process surpasses an acceptable range, wherein, when the machine control parameter of the semiconductor manufacturing process surpasses the acceptable range, the above steps are repeated. When the machine control parameter of the semiconductor manufacturing process does not surpass the acceptable range, the machine control parameter of the semiconductor manufacturing process is used for adjusting the machine. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A fuzzy control method for adjusting a semiconductor machine, applied to a semiconductor machine in a semiconductor manufacturing process, the method comprising:
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providing a machine measurement parameter of a pre-semiconductor manufacturing process, a machine measurement parameter of the semiconductor manufacturing process, and a machine operation parameter of the semiconductor manufacturing process; selecting a machine adjusting level of the semiconductor manufacturing process; performing a fuzzy operation such that the difference between the machine measurement parameter of the pre-semiconductor manufacturing process and the machine operation parameter of the semiconductor manufacturing process is defined as a parameter input value, the difference between the machine measurement parameter of the semiconductor manufacturing process and the machine operation parameter of the semiconductor manufacturing process is defined as another parameter input value, a parameter output value is defined, and a membership function value corresponded by the two parameter input values and the parameter output value is defined; building a fuzzy rule, wherein a condition set of the fuzzy rule is a membership function value corresponded by the two parameter input values; performing a deciding operation, a result of the deciding operation is a membership function value corresponded by the parameter output value; performing a de-fuzzy operation to the membership function value corresponded by the parameter output value to obtain a machine control parameter of the semiconductor manufacturing process; and determining whether the machine control parameter of the semiconductor manufacturing process surpasses an acceptable range, wherein, when the machine control parameter of the semiconductor manufacturing process surpasses the acceptable range, return to the step of building a fuzzy rule;
when the machine control parameter of the semiconductor manufacturing process does not surpass the acceptable range, the machine control parameter of the semiconductor manufacturing process is used for adjusting the machine. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A fuzzy control method for adjusting a semiconductor machine, applied to a semiconductor machine in a semiconductor manufacturing process, the method comprising:
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providing a machine measurement parameter of the semiconductor manufacturing process, and a machine operation parameter of the semiconductor manufacturing process; executing a statistical operation, wherein the machine measurement parameter of the semiconductor manufacturing process is defined as a parameter input value, and the machine operation parameter of the semiconductor manufacturing process is defined as another parameter input value; executing a fuzzy deciding operation, wherein a parameter output value is defined, a machine control parameter of the semiconductor manufacturing process is calculated, and the machine control parameter is the parameter output value; and determining whether the machine control parameter of the semiconductor manufacturing process surpasses an acceptable range, wherein, when the machine control parameter of the semiconductor manufacturing process surpasses the acceptable range, the above step of executing a fuzzy deciding operation is repeated. When the machine control parameter of the semiconductor manufacturing process does not surpass the acceptable range, the machine control parameter of the semiconductor manufacturing process is used for adjusting the machine. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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Specification