SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
1. A semiconductor device which is a field-effect transistor using a metallic oxide for a channel,wherein said metallic oxide includes a channel region and includes a source region and drain region having a lower oxygen content and higher conductivity than said channel region, andwherein said channel region exhibits semiconductor characteristics and the oxygen content decreases with depth below the surface.
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Abstract
A metallic oxide semiconductor device with high performance and small variations. It is a field effect transistor using a metallic oxide film for the channel, which includes a channel region and a source region and comprises a drain region with a lower oxygen content than the channel region in the metallic oxide, in which the channel region exhibits semiconductor characteristics and the oxygen content decreases with depth below the surface.
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Citations
13 Claims
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1. A semiconductor device which is a field-effect transistor using a metallic oxide for a channel,
wherein said metallic oxide includes a channel region and includes a source region and drain region having a lower oxygen content and higher conductivity than said channel region, and wherein said channel region exhibits semiconductor characteristics and the oxygen content decreases with depth below the surface.
Specification