Silicon Carbide Devices Having Smooth Channels
First Claim
Patent Images
1. A power device, comprising:
- a p-type conductivity well region;
a buried p+ conductivity region in the p-type conductivity well region;
an n+ conductivity region on the buried p+ conductivity region; and
a channel region of the power device adjacent the buried p+ conductivity region and n+ conductivity region, the channel region of the power device having a root mean square (RMS) surface roughness of less than about 1.0 Å
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Abstract
Power devices are provided including a p-type conductivity well region and a buried p+ conductivity region in the p-type conductivity well region. An n+ conductivity region is provided on the buried p+ conductivity region. A channel region of the power device is provided adjacent the buried p+ conductivity region and n+ conductivity region, the channel region of the power device having a root mean square (RMS) surface roughness of less than about 1.0 Å.
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Citations
31 Claims
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1. A power device, comprising:
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a p-type conductivity well region; a buried p+ conductivity region in the p-type conductivity well region; an n+ conductivity region on the buried p+ conductivity region; and a channel region of the power device adjacent the buried p+ conductivity region and n+ conductivity region, the channel region of the power device having a root mean square (RMS) surface roughness of less than about 1.0 Å
. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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- 17. A Metal Oxide Semiconductor Field Effect Transistor (MOSFET) comprising a channel region having a root mean square (RMS) surface roughness of less than about 1.0 Å
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30. A power device, comprising:
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a p-type conductivity well region; a buried p+ conductivity region in the p-type conductivity well region; an n+ conductivity region on the buried p+ conductivity region; and a channel region of the power device adjacent the buried p+ conductivity region and n+ conductivity region; and an n−
conductivity region on the channel region of the power device, the presence of the n−
conductivity region providing a reduction in a surface roughness of the channel region. - View Dependent Claims (31)
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Specification