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INTEGRATED MEMS DEVICE AND CONTROL CIRCUIT

  • US 20090261416A1
  • Filed: 04/18/2008
  • Published: 10/22/2009
  • Est. Priority Date: 04/18/2008
  • Status: Abandoned Application
First Claim
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1. An integrated circuit, comprising:

  • a silicon-on-insulator (SOI) substrate including a buried oxide layer positioned between a top-side silicon layer and a bottom-side silicon layer;

    a micro-electromechanical system (MEMS) device integrated into the top-side silicon layer;

    a semiconductor layer formed over the bottom-side silicon layer; and

    a control circuit integrated into the semiconductor layer and configured to control the MEMS device.

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