SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURE
First Claim
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1. A method of forming a semiconductor structure, the method comprising:
- forming a first opening in a semiconductor material;
forming a dielectric material in the first opening;
forming a unidirectional transistor, wherein forming the unidirectional transistor comprises forming a shield layer over the semiconductor material and forming a control electrode of the unidirectional transistor over the semiconductor material after forming the shield layer, wherein at least a portion of the shield layer is disposed between at least a portion of the control electrode and at least a portion of the semiconductor material; and
simultaneously forming a first portion of the unidirectional transistor and a first portion of a bidirectional transistor in or over the semiconductor material, wherein the dielectric material is between a second portion of the unidirectional transistor and a second portion of the bidirectional transistor.
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Abstract
In various embodiments, semiconductor structures and methods to manufacture these structures are disclosed. In one embodiment, a method includes forming a portion of the unidirectional transistor and a portion of a bidirectional transistor in or over a semiconductor material simultaneously. Other embodiments are described and claimed.
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Citations
12 Claims
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1. A method of forming a semiconductor structure, the method comprising:
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forming a first opening in a semiconductor material; forming a dielectric material in the first opening; forming a unidirectional transistor, wherein forming the unidirectional transistor comprises forming a shield layer over the semiconductor material and forming a control electrode of the unidirectional transistor over the semiconductor material after forming the shield layer, wherein at least a portion of the shield layer is disposed between at least a portion of the control electrode and at least a portion of the semiconductor material; and simultaneously forming a first portion of the unidirectional transistor and a first portion of a bidirectional transistor in or over the semiconductor material, wherein the dielectric material is between a second portion of the unidirectional transistor and a second portion of the bidirectional transistor. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A semiconductor structure, comprising:
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a semiconductor material having a first opening formed therein; a dielectric material disposed in the first opening; a unidirectional transistor, wherein the unidirectional transistor comprises a shield layer over the semiconductor material and a control electrode of the unidirectional transistor disposed over the semiconductor material, wherein at least a portion of the shield layer is disposed between at least a portion of the control electrode and at least a portion of the semiconductor material; and a first portion of the unidirectional transistor and a first portion of a bidirectional transistor being disposed in or over the semiconductor material, wherein the dielectric material is between a second portion of the unidirectional transistor and a second portion of the bidirectional transistor. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification