MASK TRANSPORT SYSTEM CONFIGURED TO TRANSPORT A MASK INTO AND OUT OF A LITHOGRAPHIC APPARATUS

• US 20090262327A1
• Filed: 06/12/2009
• Published: 10/22/2009
• Est. Priority Date: 12/27/2002
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: HEERENS, Gert-Jan
• Granted Patent: US 8,235,212 B2
• Time in Patent Office: Days
• US Class Current: 355/75
• CPC Class Codes: G03F 1/66 Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70741 Handling masks outside exposure position, e.g. reticle libraries
• CPC Class Codes: G03F 7/70808 Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
• CPC Class Codes: G03F 7/70916 Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
• CPC Class Codes: G03F 7/70983 Optical system protection, e.g. pellicles or removable covers for protection of mask

Abstract

A mask transport system is configured to transport a mask into and out of a lithographic apparatus. The mask transport system includes a first container configured to shield a top side and a bottom side of the mask. At least a portion of the container is at least partially translucent for radiation having a predetermined wavelength used to detect contamination on the top side or the bottom side of the mask when the mask is shielded by the first container. The mask transport system also includes a second container configured to enclose the first container. The second container includes a first part defining a first opening and an openable cover that covers the first opening. The cover is configured to open and release the first container within the lithographic apparatus or at an interface with the lithographic apparatus.

Claims

1. A mask transport system configured to transport a mask into and out of a lithographic apparatus, the mask transport system comprising:

a first container configured to shield a top side and a bottom side of the mask, at least a portion of the container being at least partially translucent for radiation having a predetermined wavelength used to detect contamination on the top side or the bottom side of the mask when the mask is shielded by the first container; and

a second container configured to enclose the first container, the second container comprising a first part defining a first opening and an openable cover that covers said first opening, the cover being configured to open and release the first container within the lithographic apparatus or at an interface with the lithographic apparatus.

2. The mask transport system according to claim 1, wherein the translucent part of the first container comprises glass.

3. The mask transport system according to claim 1, wherein the translucent part of the first container comprises plexiglass.

4. The mask transport system according to claim 1, wherein the first container comprises a top portion configured to be connected to the top side of the mask, and a bottom portion configured to be connected to the bottom side of the mask.

5. The mask transport system according to claim 4, wherein the first container further comprises a plurality of connectors configured to connect the top portion to the top side of the mask and to connect the bottom portion to the bottom side of the mask.

6. The mask transport system according to claim 5, wherein the connectors are at least partially porous to allow a pressure difference between the outside and the inside of the first container to be neutralized.

7. The mask transport system according to claim 5, wherein the first container further comprises a plurality of closing devices configured to connect the top portion and the bottom portion to the mask.

8. The mask transport system according to claim 1, wherein the first container is configured to enclose the mask.

9. The mask transport system according to claim 8, wherein the first container comprises a top portion, a bottom portion connected to the top portion, and a support configured to support the mask inside of the first container, wherein at least one of the top portion and the bottom portion is at least partially translucent for the radiation having the predetermined wavelength used to detect contamination on the mask when the mask is enclosed by the first container.

10. The mask transport system according to claim 9, wherein the first container further comprises a plurality of connectors configured to connect the top portion and the bottom portion, wherein the connectors are at least partially porous to allow a pressure difference between the outside and the inside of the first container to be neutralized.

11. In combination:

a lithographic apparatus comprising

a support configured to support a mask, the mask being configured to pattern a beam of radiation to form a patterned beam of radiation;

a projection system configured to project the patterned beam of radiation onto a substrate; and

an enclosed protective environment in which the mask is handled, processed, or used, the enclosed protective environment comprising a first part defining a first opening and an openable wall part covering the first opening, the enclosed protective environment being adapted to be filled with an inert gas or to be evacuated; and

a mask transport system comprising

a storage box for the mask to be supported on the support of the lithographic apparatus, the storage box comprising a second part defining a second opening and an openable cover that covers the second opening;

a container configured to shield a top side and a bottom side of the mask, at least a portion of the container being at least partially translucent for radiation having a predetermined wavelength used to detect contamination on the top side or the bottom side of the mask when the mask is enclosed by the first container,

wherein the second part of the storage box is configured to engage the first part of the enclosed protective environment, and

wherein the openable cover and the openable wall part are movable into the enclosed protective environment to enable the mask to be transferred from the container and the storage box to the enclosed protective environment.

12. The combination according to claim 11, wherein the translucent part of the container comprises glass.

13. The combination according to claim 11, wherein the translucent part of the container comprises plexiglass.

14. The combination according to claim 11, wherein the container comprises a top portion configured to be connected to the top side of the mask, and a bottom portion configured to be connected to the bottom side of the mask.

15. The combination according to claim 14, wherein the container further comprises a plurality of connectors configured to connect the top portion to the top side of the mask and to connect the bottom portion to the bottom side of the mask.

16. The combination according to claim 15, wherein the connectors are at least partially porous to allow a pressure difference between the outside and the inside of the container to be neutralized.

17. The combination according to claim 15, wherein the container further comprises a plurality of closing devices configured to connect the top portion and the bottom portion to the mask.

18. The combination according to claim 11, wherein the container is configured to enclose the mask.

19. The combination according to claim 18, wherein the container comprises a top portion, a bottom portion connected to the top portion, and a support configured to support the mask inside of the container, wherein at least one of the top portion and the bottom portion is at least partially translucent for the radiation having the predetermined wavelength used to detect contamination on the mask when the mask is enclosed by the container.

20. The combination according to claim 19, wherein the container further comprises a plurality of connectors configured to connect the top portion and the bottom portion, wherein the connectors are at least partially porous to allow a pressure difference between the outside and the inside of the container to be neutralized.