MASK TRANSPORT SYSTEM CONFIGURED TO TRANSPORT A MASK INTO AND OUT OF A LITHOGRAPHIC APPARATUS
First Claim
1. A mask transport system configured to transport a mask into and out of a lithographic apparatus, the mask transport system comprising:
- a first container configured to shield a top side and a bottom side of the mask, at least a portion of the container being at least partially translucent for radiation having a predetermined wavelength used to detect contamination on the top side or the bottom side of the mask when the mask is shielded by the first container; and
a second container configured to enclose the first container, the second container comprising a first part defining a first opening and an openable cover that covers said first opening, the cover being configured to open and release the first container within the lithographic apparatus or at an interface with the lithographic apparatus.
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Accused Products
Abstract
A mask transport system is configured to transport a mask into and out of a lithographic apparatus. The mask transport system includes a first container configured to shield a top side and a bottom side of the mask. At least a portion of the container is at least partially translucent for radiation having a predetermined wavelength used to detect contamination on the top side or the bottom side of the mask when the mask is shielded by the first container. The mask transport system also includes a second container configured to enclose the first container. The second container includes a first part defining a first opening and an openable cover that covers the first opening. The cover is configured to open and release the first container within the lithographic apparatus or at an interface with the lithographic apparatus.
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Citations
20 Claims
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1. A mask transport system configured to transport a mask into and out of a lithographic apparatus, the mask transport system comprising:
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a first container configured to shield a top side and a bottom side of the mask, at least a portion of the container being at least partially translucent for radiation having a predetermined wavelength used to detect contamination on the top side or the bottom side of the mask when the mask is shielded by the first container; and a second container configured to enclose the first container, the second container comprising a first part defining a first opening and an openable cover that covers said first opening, the cover being configured to open and release the first container within the lithographic apparatus or at an interface with the lithographic apparatus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. In combination:
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a lithographic apparatus comprising a support configured to support a mask, the mask being configured to pattern a beam of radiation to form a patterned beam of radiation; a projection system configured to project the patterned beam of radiation onto a substrate; and an enclosed protective environment in which the mask is handled, processed, or used, the enclosed protective environment comprising a first part defining a first opening and an openable wall part covering the first opening, the enclosed protective environment being adapted to be filled with an inert gas or to be evacuated; and a mask transport system comprising a storage box for the mask to be supported on the support of the lithographic apparatus, the storage box comprising a second part defining a second opening and an openable cover that covers the second opening; a container configured to shield a top side and a bottom side of the mask, at least a portion of the container being at least partially translucent for radiation having a predetermined wavelength used to detect contamination on the top side or the bottom side of the mask when the mask is enclosed by the first container, wherein the second part of the storage box is configured to engage the first part of the enclosed protective environment, and wherein the openable cover and the openable wall part are movable into the enclosed protective environment to enable the mask to be transferred from the container and the storage box to the enclosed protective environment. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification