SENSOR
First Claim
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1. A sensor comprising:
- a detecting element including an acceleration sensor which comprises;
a weight coupled to a rigid section via a flexible section;
a substrate confronting the weight; and
an electrode section formed of opposed electrodes placed on respective opposed faces of the weight and the substrate.
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Abstract
A sensor includes detecting element (28) with an acceleration sensor, which is formed of weight (18) coupled to rigid section (14) via flexible section (16), substrate (10) confronting weight (18), and an electrode section including opposed electrodes (20, 22, 24, 26) placed on respective opposed faces of weight (18) and substrate (10). This structure prevents weight (18) from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.
61 Citations
17 Claims
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1. A sensor comprising:
a detecting element including an acceleration sensor which comprises; a weight coupled to a rigid section via a flexible section; a substrate confronting the weight; and an electrode section formed of opposed electrodes placed on respective opposed faces of the weight and the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
Specification