PLANAR HEATER AND SEMICONDUCTOR HEAT TREATMENT APPARATUS PROVIDED WITH THE HEATER

• US 20090266808A1
• Filed: 08/22/2007
• Published: 10/29/2009
• Est. Priority Date: 09/28/2006
• Status: Abandoned Application

• Current Assignee: Covalent Materials Corporation, Tokyo Electron Limited
• Original Assignee: Covalent Materials Corporation, Tokyo Electron Limited
• Inventors: Kawasaki, Hiroo, Shibata, Kazuo
• Application Number:
  US12/441,639
• Publication Number:
  US 20090266808A1
• Time in Patent Office: Days
• US Class Current: 219/444.100
• CPC Class Codes: C23C 16/4581 characterised by material of construction or surface finish of the means for supporting the substrate
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H05B 3/145 Carbon only, e.g. carbon black, graphite

Abstract

A plane heater and a semiconductor heat treatment apparatus having the heater which suppress high frequency induction heating by having an earth electrode therein for suppressing high frequency induction and do not corrode with an excited reaction gas is provided. A plane heater 1 includes a carbon wire heating element CW arranged and sealed two-dimensionally inside a silica glass plate-like member 2 and an earth electrode 3 arranged and sealed two-dimensionally inside the silica glass plate-like member 2 above the above-mentioned carbon wire heating element CW.

Claims

1. A plane heater comprising a carbon wire heating element arranged and sealed two-dimensionally inside a silica glass plate-like member and an earth electrode arranged and sealed two-dimensionally inside the silica glass plate-like member above said carbon wire heating element, wherein

said carbon wire heating element is accommodated in a groove formed at a bottom face of a silica glass plate-like member and said earth electrode is accommodated in a recess formed at a top face of said silica glass plate-like member, and other silica glass plate-like members are fused to the top face and bottom face of said silica glass plate-like member to seal said carbon wire heating element and said earth electrode inside the silica glass plate-like member, and

a plurality of projections are formed inside said recess and a plurality of through holes are formed in said earth electrode at predetermined intervals, and the projections formed inside said recess are inserted through the through holes of said earth electrode.

3. The plane heater as claimed in claim 1, wherein said earth electrode is formed of a carbon material.

4. The plane heater as claimed in claim 3, wherein said carbon material is a carbon sheet having a thickness of 1 mm or less.

5. The plane heater as claimed in claim 1, wherein a difference between a fusion-bonding area for bonding the top face of said silica glass plate-like member to the other silica glass plate-like member and a fusion-bonding area for bonding the bottom face of said silica glass plate-like member to the other silica glass plate-like member is 8% or less.

6. The plane heater as claimed in claim 1, wherein a connection wire connected with said earth electrode is connected electrically by crimping the connection wire to the bottom face of the earth electrode.

7. The plane heater as claimed in claim 6, wherein a knot is formed on the connection wire connected with said earth electrode and said knot is crimped to the bottom face of the earth electrode.

8. A semiconductor heat treatment apparatus comprising the plane heater as claimed in claim 1.

9. A semiconductor heat treatment apparatus comprising the plane heater as claimed in claim 3.

10. A semiconductor heat treatment apparatus comprising the plane heater as claimed in claim 4.

11. A semiconductor heat treatment apparatus comprising the plane heater as claimed in claim 5.

12. A semiconductor heat treatment apparatus comprising the plane heater as claimed in claim 6.

13. A semiconductor heat treatment apparatus comprising the plane heater as claimed in claim 7.

2. (canceled)