BONDED SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING THE SAME
First Claim
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1. A bonded semiconductor structure static random access memory circuit, comprising:
- a support substrate which carries a first horizontally oriented transistor, and an interconnect region which includes a conductive line; and
a donor substrate which includes a semiconductor layer stack coupled to a donor substrate body region through a detach region, wherein the semiconductor layer stack is coupled to the interconnect region through a bonding interface, and wherein the semiconductor layer stack includes a pn junction.
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Abstract
A bonded semiconductor structure static random access memory circuit includes a support substrate which carries a first horizontally oriented transistor, and an interconnect region which includes a conductive line. The memory circuit includes a donor substrate which includes a semiconductor layer stack coupled to a donor substrate body region through a detach region, wherein the semiconductor layer stack is coupled to the interconnect region through a bonding interface, and wherein the semiconductor layer stack includes a pn junction.
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Citations
20 Claims
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1. A bonded semiconductor structure static random access memory circuit, comprising:
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a support substrate which carries a first horizontally oriented transistor, and an interconnect region which includes a conductive line; and a donor substrate which includes a semiconductor layer stack coupled to a donor substrate body region through a detach region, wherein the semiconductor layer stack is coupled to the interconnect region through a bonding interface, and wherein the semiconductor layer stack includes a pn junction. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of manufacturing a bonded semiconductor structure static random access memory circuit, comprising:
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providing a support substrate which carries a first type of transistor; providing a donor substrate which includes a semiconductor layer stack coupled to a donor substrate body region through a detach region, wherein the semiconductor layer stack includes a pn junction; coupling the semiconductor layer stack to the support substrate through a bonding interface; and processing the semiconductor layer stack to form a second type of transistor. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A bonded semiconductor structure static random access memory circuit, comprising:
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a support substrate which carries a first horizontally oriented transistor, and an interconnect region which includes a conductive line; and a first mesa structure coupled to the interconnect region through a first bonding interface, wherein the first mesa structure includes a pn junction. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification