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Thin film particle sensor

  • US 20090272179A1
  • Filed: 03/10/2009
  • Published: 11/05/2009
  • Est. Priority Date: 05/05/2006
  • Status: Active Grant
First Claim
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1. A microfluidic sensor, comprising:

  • a plurality of stacked thin film substantially planar layers, certain of said layers carrying one or more electrode to dispose a plurality of electrodes in a 3-dimensional array in space; and

    a fluid path, disposed inside said sensor, comprising;

    a first portion disposed parallel to, and within, said layers;

    a second portion provided by a tunnel passing through at least one layer, a constriction in said tunnel being sized to urge particles entrained in a carrier fluid into substantially single-file travel through a particle interrogation zone; and

    a third portion disposed parallel to, and within, said layers, said first portion and said third portion being disposed on opposite sides of said particle interrogation zone.

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