Pressure Sensor Having Sealed And Apertured Chambers
First Claim
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1. A pressure sensor comprising:
- a substrate assembly having a first substrate bonded to a second substrate via an intermediate bonding layer so as to define sealed channels in the first substrate;
a sealed reference chamber on said first substrate and having said sealed channels; and
an apertured chamber on said first substrate and covering the sealed reference chamber.
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Abstract
A pressure sensor is provided having a substrate assembly having a first substrate bonded to a second substrate via an intermediate bonding layer so as to define sealed channels in the first substrate, a sealed reference chamber on said first substrate and having the sealed channels, and an apertured chamber on said first substrate and covering the sealed reference chamber.
68 Citations
11 Claims
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1. A pressure sensor comprising:
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a substrate assembly having a first substrate bonded to a second substrate via an intermediate bonding layer so as to define sealed channels in the first substrate; a sealed reference chamber on said first substrate and having said sealed channels; and an apertured chamber on said first substrate and covering the sealed reference chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A pressure sensor as claimed in claim 11, wherein the low melting point material is selected from the group consisting of:
- Au—
Si;
Glass Frit;
Au—
Au;
PDMS;
TiN;
Si3N4;
LPCVD PSG;
APCVD BO; and
Boron-Doped Si.
- Au—
Specification