Methods for Manufacturing Three-Dimensional Devices and Devices Created Thereby
First Claim
1. A device comprising:
- a cast component, said cast component comprising a plurality of component surfaces, a component surface from said plurality of component surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by a plurality of layers of a metallic foil stack lamination parent mold, said plurality of 3-dimensional micro-features comprising at least one protruding undercut, said plurality of component surfaces defining a periphery of a layer-less volume; and
an electrically conductive feature extending through and/or across a portion of said cast component.
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Accused Products
Abstract
In certain exemplary embodiments of the present invention, three-dimensional micro-mechanical devices and/or micro-structures can be made using a production casting process. As part of this process, an intermediate mold can be made from or derived from a precision stack lamination and used to fabricate the devices and/or structures. Further, the micro-devices and/or micro-structures can be fabricated on planar or nonplanar surfaces through use of a series of production casting processes and intermediate molds. The use of precision stack lamination can allow the fabrication of high aspect ratio structures. Moreover, via certain molding and/or casting materials, molds having cavities with protruding undercuts also can be fabricated. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. This abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
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Citations
52 Claims
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1. A device comprising:
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a cast component, said cast component comprising a plurality of component surfaces, a component surface from said plurality of component surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by a plurality of layers of a metallic foil stack lamination parent mold, said plurality of 3-dimensional micro-features comprising at least one protruding undercut, said plurality of component surfaces defining a periphery of a layer-less volume; and an electrically conductive feature extending through and/or across a portion of said cast component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A device comprising:
a cast component, said cast component comprising a plurality of component surfaces, a component surface from said plurality of component surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by a plurality of layers of a metallic foil stack lamination parent mold, said plurality of 3-dimensional micro-features comprising at least one protruding undercut, said plurality of component surfaces defining a periphery of a layer-less volume, wherein said cast component comprises silicon carbide. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A device comprising:
a first cast component at least partially bounded by a cast wall comprising a plurality of wall surfaces, a wall surface from said plurality of wall surfaces comprising a first plurality of 3-dimensional micro-features that substantially spatially invertedly replicate an intermediate mold surface of an intermediate mold, said intermediate mold surface substantially spatially invertedly replicating a parent mold surface formed by a plurality of layers of a metallic foil stack lamination parent mold, said intermediate mold surface defining at least a portion of a periphery of a layer-less volume, said first cast component comprising silicone carbide.
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31. A lithographically-derived micro-machined metallic foil stack lamination mold that defines a protruding undercut, said lithographically-derived micro-machined metallic foil stack lamination mold comprising silicon carbide.
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32. A device comprising:
a cast component, said cast component comprising a plurality of component surfaces, a predetermined component surface from said plurality of component surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by a plurality of layers of a metallic foil stack lamination parent mold, said plurality of 3-dimensional micro-features comprising at least one protruding undercut, said plurality of component surfaces defining a periphery of a layer-less volume, said predetermined component surface having a predetermined surface condition. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52)
Specification