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PIXEL STRUCTURE OF A THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAY AND FABRICATING METHOD THEREOF

  • US 20090272977A1
  • Filed: 07/16/2009
  • Published: 11/05/2009
  • Est. Priority Date: 08/12/2004
  • Status: Active Grant
First Claim
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1. A method of fabricating a pixel structure of a thin film transistor liquid crystal display, comprising the steps of:

  • providing a substrate;

    forming a transparent conductive layer and a first metallic layer in sequence over the substrate;

    performing a first mask process to pattern the first metallic layer and the transparent conductive layer so as to define a gate pattern and a pixel electrode pattern;

    forming a gate insulating layer and a semiconductor layer in sequence over the substrate to cover the gate pattern and the pixel electrode pattern;

    performing a second mask process to remove the first metallic layer of the pixel electrode pattern but remaining the gate insulating layer and the semiconductor layer over the gate pattern;

    forming a second metallic layer over the substrate;

    performing a third mask process to pattern the second metallic layer so as to form a source pattern and a drain pattern over the remained semiconductor layer;

    forming a passivation layer over the substrate; and

    performing a fourth mask process to pattern the passivation layer so as to expose the transparent conductive layer of the pixel electrode pattern.

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