METHODS OF FORMING ISOLATED ACTIVE AREAS, TRENCHES, AND CONDUCTIVE LINES IN SEMICONDUCTOR STRUCTURES AND SEMICONDUCTOR STRUCTURES INCLUDING THE SAME
First Claim
Patent Images
1. A method of forming semiconductor structures, the method comprising:
- forming a first expendable material on a substrate;
patterning the first expendable material in a first direction on the substrate;
forming a pattern of first spacers on sidewalls of the first expendable material;
removing the first expendable material;
transferring the pattern of first spacers into the substrate;
patterning a second expendable material in a second direction on the substrate;
forming a pattern of second spacers on sidewalls of the second expendable material;
removing the second expendable material; and
transferring the pattern of second spacers into the substrate to form trenches between the second spacers.
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Abstract
Methods of pitch doubling of asymmetric features and semiconductor structures including the same are disclosed. In one embodiment, a single photolithography mask may be used to pitch double three features, for example, of a DRAM array. In one embodiment, two wordlines and a grounded gate over field may be pitch doubled. Semiconductor structures including such features are also disclosed.
115 Citations
25 Claims
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1. A method of forming semiconductor structures, the method comprising:
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forming a first expendable material on a substrate; patterning the first expendable material in a first direction on the substrate; forming a pattern of first spacers on sidewalls of the first expendable material; removing the first expendable material; transferring the pattern of first spacers into the substrate; patterning a second expendable material in a second direction on the substrate; forming a pattern of second spacers on sidewalls of the second expendable material; removing the second expendable material; and transferring the pattern of second spacers into the substrate to form trenches between the second spacers. - View Dependent Claims (2, 3, 4, 5)
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6. A semiconductor structure comprising:
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a plurality of silicon pillars in a substrate; and a plurality of trenches isolating each silicon pillar of the plurality of silicon pillars, wherein at least one of the plurality of trenches or the plurality of silicon pillars has a width of less than 44 nm. - View Dependent Claims (7)
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8. A method of forming sublithographic trenches in a semiconductor structure, the method comprising:
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forming an expendable material on a substrate comprising isolated active areas; patterning the expendable material; forming spacers on sidewalls of the expendable material; forming a sacrificial material adjacent the spacers; removing the spacers to form a plurality of gaps between the sacrificial material and the expendable material; and etching the substrate through the plurality of gaps to form a plurality of trenches therein. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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- 16. A semiconductor structure comprising a plurality of active areas separated by isolation regions, the plurality of active areas including recessed active device trenches having a width of less than a minimum feature size therein.
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20. A method of forming conductive lines on a semiconductor structure, the method comprising:
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forming a first expendable material on a substrate comprising isolated active areas and sublithographic gate trenches; patterning the first expendable material; forming spacers on sidewalls of the first expendable material; forming a second expendable material adjacent the spacers, the second expendable material and the first expendable material defining openings over the substrate; forming a sacrificial material within the openings; removing the first expendable material and the second expendable material; forming trenches in the substrate between the spacers and the sacrificial material; and filling the trenches with a conductive material. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification